JPS56147439A - Etching method - Google Patents

Etching method

Info

Publication number
JPS56147439A
JPS56147439A JP5120380A JP5120380A JPS56147439A JP S56147439 A JPS56147439 A JP S56147439A JP 5120380 A JP5120380 A JP 5120380A JP 5120380 A JP5120380 A JP 5120380A JP S56147439 A JPS56147439 A JP S56147439A
Authority
JP
Japan
Prior art keywords
nh4oh
hcl
concentration
selectively
ygayalzp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5120380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346976B2 (2
Inventor
Kazunari Oota
Masaru Kazumura
Haruyoshi Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5120380A priority Critical patent/JPS56147439A/ja
Publication of JPS56147439A publication Critical patent/JPS56147439A/ja
Publication of JPS6346976B2 publication Critical patent/JPS6346976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • H10P50/646—Chemical etching of Group III-V materials

Landscapes

  • Weting (AREA)
JP5120380A 1980-04-17 1980-04-17 Etching method Granted JPS56147439A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5120380A JPS56147439A (en) 1980-04-17 1980-04-17 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5120380A JPS56147439A (en) 1980-04-17 1980-04-17 Etching method

Publications (2)

Publication Number Publication Date
JPS56147439A true JPS56147439A (en) 1981-11-16
JPS6346976B2 JPS6346976B2 (2) 1988-09-20

Family

ID=12880333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5120380A Granted JPS56147439A (en) 1980-04-17 1980-04-17 Etching method

Country Status (1)

Country Link
JP (1) JPS56147439A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5279704A (en) * 1991-04-23 1994-01-18 Honda Giken Kogyo Kabushiki Kaisha Method of fabricating semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5279704A (en) * 1991-04-23 1994-01-18 Honda Giken Kogyo Kabushiki Kaisha Method of fabricating semiconductor device

Also Published As

Publication number Publication date
JPS6346976B2 (2) 1988-09-20

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