Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co LtdfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP7174080ApriorityCriticalpatent/JPS56167637A/ja
Priority to EP81103926Aprioritypatent/EP0040829B1/en
Priority to DE8181103926Tprioritypatent/DE3165969D1/de
Priority to US06/266,614prioritypatent/US4391984A/en
Publication of JPS56167637ApublicationCriticalpatent/JPS56167637A/ja
Publication of JPS6118539B2publicationCriticalpatent/JPS6118539B2/ja