JPS5633842A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5633842A
JPS5633842A JP10995279A JP10995279A JPS5633842A JP S5633842 A JPS5633842 A JP S5633842A JP 10995279 A JP10995279 A JP 10995279A JP 10995279 A JP10995279 A JP 10995279A JP S5633842 A JPS5633842 A JP S5633842A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
value
section
positive electrode
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10995279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262459B2 (2
Inventor
Masataka Kudou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10995279A priority Critical patent/JPS5633842A/ja
Publication of JPS5633842A publication Critical patent/JPS5633842A/ja
Publication of JPS6262459B2 publication Critical patent/JPS6262459B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6324—Formation by anodic treatments, e.g. anodic oxidation

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Formation Of Insulating Films (AREA)
JP10995279A 1979-08-28 1979-08-28 Manufacture of semiconductor device Granted JPS5633842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10995279A JPS5633842A (en) 1979-08-28 1979-08-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10995279A JPS5633842A (en) 1979-08-28 1979-08-28 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5633842A true JPS5633842A (en) 1981-04-04
JPS6262459B2 JPS6262459B2 (2) 1987-12-26

Family

ID=14523281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10995279A Granted JPS5633842A (en) 1979-08-28 1979-08-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5633842A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0492658U (2) * 1990-12-29 1992-08-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916393A (2) * 1972-03-29 1974-02-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916393A (2) * 1972-03-29 1974-02-13

Also Published As

Publication number Publication date
JPS6262459B2 (2) 1987-12-26

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