JPS5643763A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5643763A
JPS5643763A JP11900879A JP11900879A JPS5643763A JP S5643763 A JPS5643763 A JP S5643763A JP 11900879 A JP11900879 A JP 11900879A JP 11900879 A JP11900879 A JP 11900879A JP S5643763 A JPS5643763 A JP S5643763A
Authority
JP
Japan
Prior art keywords
forming region
element forming
sio2 layer
shallow
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11900879A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232790B2 (2
Inventor
Yasuhisa Sato
Daijiro Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11900879A priority Critical patent/JPS5643763A/ja
Publication of JPS5643763A publication Critical patent/JPS5643763A/ja
Publication of JPH0232790B2 publication Critical patent/JPH0232790B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/014—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/17—Isolation regions comprising dielectric materials formed using trench refilling with dielectric materials, e.g. shallow trench isolations

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP11900879A 1979-09-17 1979-09-17 Manufacture of semiconductor device Granted JPS5643763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11900879A JPS5643763A (en) 1979-09-17 1979-09-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11900879A JPS5643763A (en) 1979-09-17 1979-09-17 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5643763A true JPS5643763A (en) 1981-04-22
JPH0232790B2 JPH0232790B2 (2) 1990-07-23

Family

ID=14750702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11900879A Granted JPS5643763A (en) 1979-09-17 1979-09-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5643763A (2)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874977A (2) * 1971-12-28 1973-10-09
JPS5221781A (en) * 1975-08-12 1977-02-18 Nec Corp Semiconductor unit producing system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874977A (2) * 1971-12-28 1973-10-09
JPS5221781A (en) * 1975-08-12 1977-02-18 Nec Corp Semiconductor unit producing system

Also Published As

Publication number Publication date
JPH0232790B2 (2) 1990-07-23

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