JPS5645562A - Ionization device - Google Patents

Ionization device

Info

Publication number
JPS5645562A
JPS5645562A JP12232179A JP12232179A JPS5645562A JP S5645562 A JPS5645562 A JP S5645562A JP 12232179 A JP12232179 A JP 12232179A JP 12232179 A JP12232179 A JP 12232179A JP S5645562 A JPS5645562 A JP S5645562A
Authority
JP
Japan
Prior art keywords
ion
ionization box
vapor
electrode
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12232179A
Other languages
Japanese (ja)
Other versions
JPS637424B2 (en
Inventor
Fusafumi Nakao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12232179A priority Critical patent/JPS5645562A/en
Publication of JPS5645562A publication Critical patent/JPS5645562A/en
Publication of JPS637424B2 publication Critical patent/JPS637424B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To enable an ion collector to be suitably used for monitoring the process of vapor flow during the production of vapor-deposition film by installing the ion collector in an ionization box, and shielding an electron generator from the introduction holes of a screening cylinder. CONSTITUTION:A shield electrode 9 and 9' are installed at the opposite sides of an ionization box 8. The shield electrode 9 is provided with an ion-drawing hole 17 penetrating the center of that, and ions produced by electronic impact which is caused in the ionization box 8 are injected toward a mass spectrograph. A needlelike whole-pressure-measuring ion-collector 10 is an electrode for measuring the amount of ions produced in the ionization box 8, and works as an ion-thrusting electrode during the measurement of a partial pressure. A screening cylinder 13 surrounds the ionization box 8, a filament 7 and 7', and it is provided with a vapor- introducing hole 14 and 14'. The holes 14 and 14' introduce a vapor flow 15, which serves as an analysis sample, into the ionization box 8.
JP12232179A 1979-09-21 1979-09-21 Ionization device Granted JPS5645562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12232179A JPS5645562A (en) 1979-09-21 1979-09-21 Ionization device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12232179A JPS5645562A (en) 1979-09-21 1979-09-21 Ionization device

Publications (2)

Publication Number Publication Date
JPS5645562A true JPS5645562A (en) 1981-04-25
JPS637424B2 JPS637424B2 (en) 1988-02-16

Family

ID=14833064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12232179A Granted JPS5645562A (en) 1979-09-21 1979-09-21 Ionization device

Country Status (1)

Country Link
JP (1) JPS5645562A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06315474A (en) * 1988-06-13 1994-11-15 Marvin B Bacaner Small-sized mass spectrometer
JP2007335188A (en) * 2006-06-14 2007-12-27 Ulvac Japan Ltd Ion source for mass spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06315474A (en) * 1988-06-13 1994-11-15 Marvin B Bacaner Small-sized mass spectrometer
JP2007335188A (en) * 2006-06-14 2007-12-27 Ulvac Japan Ltd Ion source for mass spectrometer

Also Published As

Publication number Publication date
JPS637424B2 (en) 1988-02-16

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