JPS5647690A - Cryopump - Google Patents

Cryopump

Info

Publication number
JPS5647690A
JPS5647690A JP12235879A JP12235879A JPS5647690A JP S5647690 A JPS5647690 A JP S5647690A JP 12235879 A JP12235879 A JP 12235879A JP 12235879 A JP12235879 A JP 12235879A JP S5647690 A JPS5647690 A JP S5647690A
Authority
JP
Japan
Prior art keywords
exhaustion
joule
low temperature
condensation panel
thomson valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12235879A
Other languages
Japanese (ja)
Inventor
Kazuaki Nakamura
Yutaka Momose
Tokio Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP12235879A priority Critical patent/JPS5647690A/en
Publication of JPS5647690A publication Critical patent/JPS5647690A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To achieve high speed exhaustion and make hydrogen exhaustion easy, by arranging a condensation panel at the low temperature section downstream of a Joule-Thomson valve.
CONSTITUTION: A cryopump body which consists of a frame 40 supporting chevrons 38, etc. and a condensation panel 35 on which activated charcoal, etc. are pasted is connected to a Joule-Thomson valve 22 on its downstream side. A working gas passing through a choke valve 20 is cooled to a low temperature by enthalpy expansion at the Joule-Thomson valve 22, etc. to reach approximately the temperature 10K, and return to the cryopump body through a bellows coupling 31. Because a part 35a of the condensation panel 35 exchanges heat with the supercooled gas and cools itself, it is held at a low temperature, and high speed exhaustion is achieved and hydrogen exhaustion becomes easy.
COPYRIGHT: (C)1981,JPO&Japio
JP12235879A 1979-09-21 1979-09-21 Cryopump Pending JPS5647690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12235879A JPS5647690A (en) 1979-09-21 1979-09-21 Cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12235879A JPS5647690A (en) 1979-09-21 1979-09-21 Cryopump

Publications (1)

Publication Number Publication Date
JPS5647690A true JPS5647690A (en) 1981-04-30

Family

ID=14833914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12235879A Pending JPS5647690A (en) 1979-09-21 1979-09-21 Cryopump

Country Status (1)

Country Link
JP (1) JPS5647690A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5687574A (en) * 1996-03-14 1997-11-18 Apd Cryogenics, Inc. Throttle cycle cryopumping system for Group I gases
JP2003038799A (en) * 2001-07-31 2003-02-12 Heiwa Corp Game machine
JP2008086624A (en) * 2006-10-04 2008-04-17 Heiwa Corp Ball putout device of game machine
JP2008086621A (en) * 2006-10-04 2008-04-17 Heiwa Corp Ball putout device of game machine
JP2008086627A (en) * 2006-10-04 2008-04-17 Heiwa Corp Ball putout device of game machine
JP2010234154A (en) * 2010-07-30 2010-10-21 Sanyo Product Co Ltd Game machine
JP2010279796A (en) * 2010-09-24 2010-12-16 Sanyo Product Co Ltd Game machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5687574A (en) * 1996-03-14 1997-11-18 Apd Cryogenics, Inc. Throttle cycle cryopumping system for Group I gases
JP2003038799A (en) * 2001-07-31 2003-02-12 Heiwa Corp Game machine
JP2008086624A (en) * 2006-10-04 2008-04-17 Heiwa Corp Ball putout device of game machine
JP2008086621A (en) * 2006-10-04 2008-04-17 Heiwa Corp Ball putout device of game machine
JP2008086627A (en) * 2006-10-04 2008-04-17 Heiwa Corp Ball putout device of game machine
JP2010234154A (en) * 2010-07-30 2010-10-21 Sanyo Product Co Ltd Game machine
JP2010279796A (en) * 2010-09-24 2010-12-16 Sanyo Product Co Ltd Game machine

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