JPS6419652A - Gas phase ion source - Google Patents

Gas phase ion source

Info

Publication number
JPS6419652A
JPS6419652A JP17563787A JP17563787A JPS6419652A JP S6419652 A JPS6419652 A JP S6419652A JP 17563787 A JP17563787 A JP 17563787A JP 17563787 A JP17563787 A JP 17563787A JP S6419652 A JPS6419652 A JP S6419652A
Authority
JP
Japan
Prior art keywords
gas
cooling body
cooled
cooling
helium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17563787A
Other languages
Japanese (ja)
Inventor
Yoshizo Sakuma
Ryuzo Aihara
Tadayoshi Nagafune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP17563787A priority Critical patent/JPS6419652A/en
Publication of JPS6419652A publication Critical patent/JPS6419652A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To remove the necessity of preparing a heat exchanger separately so as to simplify the constitution and reduce the cost by cooling gas for ion type with vaporized gas of refrigerant for cooling emitter. CONSTITUTION:A cooling body 17 is installed in a metal bellows 15 and when helium gas flows inside the metal bellows, it cools the cooling body. For that reason, the cooling body 17 is kept at a temperature near the liquid helium temperature. Then, in this condition, if helium gas at the normal temperature is supplied from a gas bomb to a gas introduction pipe 21, it is cooled when this helium gas passes by a part wound on the cooling body 17. That cooled helium gas is further introduced into inside a supporting cylinder 8 through an insulation pipe 22 and a connection pipe 23 and attached to the tip of an emitter 6 and ionized. Hereby, gas that becomes ion type can be cooled with simple constitution without using a heat exchanger.
JP17563787A 1987-07-14 1987-07-14 Gas phase ion source Pending JPS6419652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17563787A JPS6419652A (en) 1987-07-14 1987-07-14 Gas phase ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17563787A JPS6419652A (en) 1987-07-14 1987-07-14 Gas phase ion source

Publications (1)

Publication Number Publication Date
JPS6419652A true JPS6419652A (en) 1989-01-23

Family

ID=15999568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17563787A Pending JPS6419652A (en) 1987-07-14 1987-07-14 Gas phase ion source

Country Status (1)

Country Link
JP (1) JPS6419652A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011525037A (en) * 2008-06-20 2011-09-08 カール ツァイス エヌティーエス エルエルシー Ion source, system and method
WO2013161837A1 (en) * 2012-04-27 2013-10-31 株式会社日立ハイテクノロジーズ Charged particle microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011525037A (en) * 2008-06-20 2011-09-08 カール ツァイス エヌティーエス エルエルシー Ion source, system and method
WO2013161837A1 (en) * 2012-04-27 2013-10-31 株式会社日立ハイテクノロジーズ Charged particle microscope

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