JPS5648043A - Exposure meter for electron beam - Google Patents

Exposure meter for electron beam

Info

Publication number
JPS5648043A
JPS5648043A JP12390979A JP12390979A JPS5648043A JP S5648043 A JPS5648043 A JP S5648043A JP 12390979 A JP12390979 A JP 12390979A JP 12390979 A JP12390979 A JP 12390979A JP S5648043 A JPS5648043 A JP S5648043A
Authority
JP
Japan
Prior art keywords
electron beam
magnification
resistance
resistor
connect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12390979A
Other languages
Japanese (ja)
Inventor
Toshio Kochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12390979A priority Critical patent/JPS5648043A/en
Publication of JPS5648043A publication Critical patent/JPS5648043A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To correct a display error of an electron beam detector due to the reduction of an irradiation range of an electron beam, by changing the amplification degree of a circuit, that amplifies an output of the electron beam detector, in an interlocking action to the change of the irradiation range of the electron beam on a fluorescent plate. CONSTITUTION:When the magnification for obtaining a smaller area of irradiation of an electron beam is selected by a magnification selector switch 5, a solenoid relay 6a is operated to connect a resistor 10 and apply a resistance Ri2 in parallel to a resistance Ri1. Accordingly an input to an amplifier 3 is increased to increase the display value of a quantity of electron beams. When further changed the magnification, the magnification selector switch 5 is connected to the next terminal to actuate the other solenoid relay 6b, connect a resistor 9 further apply a resistance Ri3 in parallel. In this way, an adequate quantity of electron beams per unit area is displayed on a display panel 4.
JP12390979A 1979-09-28 1979-09-28 Exposure meter for electron beam Pending JPS5648043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12390979A JPS5648043A (en) 1979-09-28 1979-09-28 Exposure meter for electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12390979A JPS5648043A (en) 1979-09-28 1979-09-28 Exposure meter for electron beam

Publications (1)

Publication Number Publication Date
JPS5648043A true JPS5648043A (en) 1981-05-01

Family

ID=14872336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12390979A Pending JPS5648043A (en) 1979-09-28 1979-09-28 Exposure meter for electron beam

Country Status (1)

Country Link
JP (1) JPS5648043A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282440A (en) * 1988-09-19 1990-03-23 Fuji Photo Film Co Ltd Electron microscope image recording device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282440A (en) * 1988-09-19 1990-03-23 Fuji Photo Film Co Ltd Electron microscope image recording device

Similar Documents

Publication Publication Date Title
US3818693A (en) Electronic metronome
JPS5648043A (en) Exposure meter for electron beam
GB2030753A (en) Audiometer
DE2200944C3 (en) Switch device for error-free display of the switching status of a switching device, consisting of a multi-position switch and a changeover switch
US2524790A (en) Method and apparatus for making comparative measurements on oscilloscopes
US4143968A (en) Control device and copier
GB2090034B (en) A circuit arrangement in a coin checker
EP0631265B1 (en) Circuit arrangement of an optical detector for environmental monitoring and indication of a disturbing medium
US2735062A (en) Q striker
US3464030A (en) Waveform generator with audio tone control
DE7517100U (en) ANTENNA TEST RECEIVER
JPS561651A (en) Bracelet-type microminiature tereo telephone
JPS56106107A (en) Radiation thickness measuring device
JPS6441216A (en) Electron beam lithography equipment
JPS5675786A (en) Digital convergence device
JPS5832127A (en) Digital scale span adjustment device
JPS574664A (en) Beam diameter measuring device of cathode-ray tube
JPS52132619A (en) Signal meter driving circuit for am radio receiver
JPH0230898Y2 (en)
SU886321A1 (en) Switchable high-voltage power supply source for cathode ray tubes
JPS57122524A (en) Blanking circuit for electron beam projector
JPS5396716A (en) Receiving signal control cirucit
Webster Applications of the modulating electrode of television cathode-ray tubes in investigations of the wave-form of atmospherics
JPS5499484A (en) Ultra-fine grain measuring apparatus of light scattering type
JPS5452586A (en) Calibration apparatus