JPS5648043A - Exposure meter for electron beam - Google Patents

Exposure meter for electron beam

Info

Publication number
JPS5648043A
JPS5648043A JP12390979A JP12390979A JPS5648043A JP S5648043 A JPS5648043 A JP S5648043A JP 12390979 A JP12390979 A JP 12390979A JP 12390979 A JP12390979 A JP 12390979A JP S5648043 A JPS5648043 A JP S5648043A
Authority
JP
Japan
Prior art keywords
electron beam
magnification
resistance
resistor
connect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12390979A
Other languages
English (en)
Inventor
Toshio Kochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12390979A priority Critical patent/JPS5648043A/ja
Publication of JPS5648043A publication Critical patent/JPS5648043A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP12390979A 1979-09-28 1979-09-28 Exposure meter for electron beam Pending JPS5648043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12390979A JPS5648043A (en) 1979-09-28 1979-09-28 Exposure meter for electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12390979A JPS5648043A (en) 1979-09-28 1979-09-28 Exposure meter for electron beam

Publications (1)

Publication Number Publication Date
JPS5648043A true JPS5648043A (en) 1981-05-01

Family

ID=14872336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12390979A Pending JPS5648043A (en) 1979-09-28 1979-09-28 Exposure meter for electron beam

Country Status (1)

Country Link
JP (1) JPS5648043A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282440A (ja) * 1988-09-19 1990-03-23 Fuji Photo Film Co Ltd 電子顕微鏡像記録装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282440A (ja) * 1988-09-19 1990-03-23 Fuji Photo Film Co Ltd 電子顕微鏡像記録装置

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