JPS5648044A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS5648044A
JPS5648044A JP12391279A JP12391279A JPS5648044A JP S5648044 A JPS5648044 A JP S5648044A JP 12391279 A JP12391279 A JP 12391279A JP 12391279 A JP12391279 A JP 12391279A JP S5648044 A JPS5648044 A JP S5648044A
Authority
JP
Japan
Prior art keywords
electron beam
valve
seperate
microswitch
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12391279A
Other languages
Japanese (ja)
Inventor
Yoshihisa Namikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12391279A priority Critical patent/JPS5648044A/en
Publication of JPS5648044A publication Critical patent/JPS5648044A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To obtain the quantity of electron beams always in a stable condition, by keeping only the continuous operation of heating a filament in a vessel when its separate valve is operated for the replacement of samples. CONSTITUTION:To obtain an independent vacuum state in a vessle 4, a knob 14 is pushed to close an electon beam passage at the lower portion of an anode 3 by a seperate valve 11 integrally formed with a shaft 12. Then a microswitch 13 is operated, and the operation of a relay 15 turns off a high voltage control switch 6' to stop the supply of a high voltage the accelerates an electron beam. Here the heating power of a filament is not cut out by the operation of the microswitch 13, then the firing for a heater for heating source of the electron beam is continued even if the seperate valve 11 is actuated to obtain independent vacuum state in the vessel 4.
JP12391279A 1979-09-28 1979-09-28 Electron beam device Pending JPS5648044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12391279A JPS5648044A (en) 1979-09-28 1979-09-28 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12391279A JPS5648044A (en) 1979-09-28 1979-09-28 Electron beam device

Publications (1)

Publication Number Publication Date
JPS5648044A true JPS5648044A (en) 1981-05-01

Family

ID=14872411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12391279A Pending JPS5648044A (en) 1979-09-28 1979-09-28 Electron beam device

Country Status (1)

Country Link
JP (1) JPS5648044A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0274758U (en) * 1988-11-29 1990-06-07
EP0594084A1 (en) * 1992-10-20 1994-04-27 Hitachi, Ltd. Scanning electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0274758U (en) * 1988-11-29 1990-06-07
EP0594084A1 (en) * 1992-10-20 1994-04-27 Hitachi, Ltd. Scanning electron microscope
US5389787A (en) * 1992-10-20 1995-02-14 Hitachi, Ltd. Scanning electron microscope
EP1139385A3 (en) * 1992-10-20 2006-05-03 Hitachi, Ltd. Scanning electron microscope

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