JPS5653770U - - Google Patents
Info
- Publication number
- JPS5653770U JPS5653770U JP13207979U JP13207979U JPS5653770U JP S5653770 U JPS5653770 U JP S5653770U JP 13207979 U JP13207979 U JP 13207979U JP 13207979 U JP13207979 U JP 13207979U JP S5653770 U JPS5653770 U JP S5653770U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979132079U JPS588768Y2 (ja) | 1979-09-26 | 1979-09-26 | マグネトロン型カソ−ド装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979132079U JPS588768Y2 (ja) | 1979-09-26 | 1979-09-26 | マグネトロン型カソ−ド装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5653770U true JPS5653770U (de) | 1981-05-12 |
| JPS588768Y2 JPS588768Y2 (ja) | 1983-02-17 |
Family
ID=29363711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979132079U Expired JPS588768Y2 (ja) | 1979-09-26 | 1979-09-26 | マグネトロン型カソ−ド装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS588768Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5896875A (ja) * | 1981-12-03 | 1983-06-09 | Ulvac Corp | スパツタリング装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000034562A (ja) * | 1998-07-14 | 2000-02-02 | Japan Energy Corp | スパッタリングターゲット及び薄膜形成装置部品 |
| US6755944B2 (en) * | 2000-11-09 | 2004-06-29 | Williams Advanced Materials, Inc. | Ion beam deposition targets having an interlocking interface and a replaceable insert |
| JP5283103B2 (ja) * | 2006-06-20 | 2013-09-04 | 独立行政法人産業技術総合研究所 | ターゲット保持装置およびターゲット保持方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512682A (ja) * | 1974-06-26 | 1976-01-10 | Fujitsu Ltd | Supatsutaringuhoho |
-
1979
- 1979-09-26 JP JP1979132079U patent/JPS588768Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512682A (ja) * | 1974-06-26 | 1976-01-10 | Fujitsu Ltd | Supatsutaringuhoho |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5896875A (ja) * | 1981-12-03 | 1983-06-09 | Ulvac Corp | スパツタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS588768Y2 (ja) | 1983-02-17 |