JPS5656025A - Elastic surface wave resonator - Google Patents

Elastic surface wave resonator

Info

Publication number
JPS5656025A
JPS5656025A JP13132379A JP13132379A JPS5656025A JP S5656025 A JPS5656025 A JP S5656025A JP 13132379 A JP13132379 A JP 13132379A JP 13132379 A JP13132379 A JP 13132379A JP S5656025 A JPS5656025 A JP S5656025A
Authority
JP
Japan
Prior art keywords
elastic surface
substrate
wave resonator
surface wave
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13132379A
Other languages
Japanese (ja)
Other versions
JPS6346605B2 (en
Inventor
Yasuo Ehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13132379A priority Critical patent/JPS5656025A/en
Publication of JPS5656025A publication Critical patent/JPS5656025A/en
Publication of JPS6346605B2 publication Critical patent/JPS6346605B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To obtain an elastic surface wave resonator of high Q by providing many grooves, reflecting elastic surface waves, to a silicon film on a piezoelectric substrate. CONSTITUTION:In lithium tantalate substrate 5 high in coupling coefficient, interdigital electrode 6 of an aluminum film is formed by being etched. Next, silicon oxide film 7 is formed on the entire surface of substrate 5 in the CVD method. On the surface of silicon oxide film 7, grooves 8 of 1mum in depth are plasma-etched in stripes of 8mum width. The thus obtained resonator has Q between about 10,000 and 30,000 and its manufacture process can employ the technique used in the mass- production line of IC at present. Consequently, excellent resonators can be obtained by the manufacture process suitable for mass-production even when lithium tantalate large in coupling coefficient is used.
JP13132379A 1979-10-13 1979-10-13 Elastic surface wave resonator Granted JPS5656025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13132379A JPS5656025A (en) 1979-10-13 1979-10-13 Elastic surface wave resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13132379A JPS5656025A (en) 1979-10-13 1979-10-13 Elastic surface wave resonator

Publications (2)

Publication Number Publication Date
JPS5656025A true JPS5656025A (en) 1981-05-16
JPS6346605B2 JPS6346605B2 (en) 1988-09-16

Family

ID=15055259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13132379A Granted JPS5656025A (en) 1979-10-13 1979-10-13 Elastic surface wave resonator

Country Status (1)

Country Link
JP (1) JPS5656025A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63294010A (en) * 1987-05-26 1988-11-30 Clarion Co Ltd Surface acoustic wave resonator
JPS63294008A (en) * 1987-05-26 1988-11-30 Clarion Co Ltd Surface acoustic wave device
WO2012029354A1 (en) * 2010-08-31 2012-03-08 太陽誘電株式会社 Acoustic wave device
JP2016225743A (en) * 2015-05-28 2016-12-28 株式会社デンソー Surface acoustic wave element and physical quantity sensor employing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585121A (en) * 1978-12-22 1980-06-26 Matsushita Electric Ind Co Ltd Surface acoustic wave element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585121A (en) * 1978-12-22 1980-06-26 Matsushita Electric Ind Co Ltd Surface acoustic wave element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63294010A (en) * 1987-05-26 1988-11-30 Clarion Co Ltd Surface acoustic wave resonator
JPS63294008A (en) * 1987-05-26 1988-11-30 Clarion Co Ltd Surface acoustic wave device
WO2012029354A1 (en) * 2010-08-31 2012-03-08 太陽誘電株式会社 Acoustic wave device
US8664835B2 (en) 2010-08-31 2014-03-04 Taiyo Yuden Co., Ltd. Acoustic wave device
JP2016225743A (en) * 2015-05-28 2016-12-28 株式会社デンソー Surface acoustic wave element and physical quantity sensor employing the same

Also Published As

Publication number Publication date
JPS6346605B2 (en) 1988-09-16

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