JPS5518190A - Frequency adjustment method for high-coupled piezoelectric oscillator - Google Patents
Frequency adjustment method for high-coupled piezoelectric oscillatorInfo
- Publication number
- JPS5518190A JPS5518190A JP9211878A JP9211878A JPS5518190A JP S5518190 A JPS5518190 A JP S5518190A JP 9211878 A JP9211878 A JP 9211878A JP 9211878 A JP9211878 A JP 9211878A JP S5518190 A JPS5518190 A JP S5518190A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- frequency
- piezoelectric
- thin film
- coupled piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 abstract 4
- 239000010408 film Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 230000008719 thickening Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To secure an accurate adjustment of the frequency for the piezoelectric ceramic plate with a simple method by providing the energy enclosing electrode to the high-coupled piezoelectric plate, forming the insulating thin film on the surface of the piezoelectric cermic plate containing the electrode and then polishing or thickening the thin film. CONSTITUTION:Insulating thin film 23 is formed on the surface of one side of high- coupled piezoelectric plate 21 with energy enclosing electrde 22 formed as if film 23 covered over electrode 22. Then film 23 is polished to increase the frequency or thickened through the sputtering or other methods to lower the frequency for adjsutment. At the same time, insulating thin films 27 and 28 are formed on both surfaces of high-coupled piezoelectric electrode 25 on both surfaces of which electrode 26 is formed, and the frequency adjustment is given in the same way as mentioned above. In such way, the characteristics can be adjusted in a high accuracy for the energy enclosing type resonator or filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9211878A JPS5518190A (en) | 1978-07-27 | 1978-07-27 | Frequency adjustment method for high-coupled piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9211878A JPS5518190A (en) | 1978-07-27 | 1978-07-27 | Frequency adjustment method for high-coupled piezoelectric oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5518190A true JPS5518190A (en) | 1980-02-08 |
Family
ID=14045511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9211878A Pending JPS5518190A (en) | 1978-07-27 | 1978-07-27 | Frequency adjustment method for high-coupled piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5518190A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109718U (en) * | 1977-02-08 | 1978-09-02 | ||
| JPS6449411A (en) * | 1987-08-20 | 1989-02-23 | Tdk Corp | Manufacture of energy confinement type piezoelectric vibrator |
| JPH01110518U (en) * | 1988-01-20 | 1989-07-26 | ||
| JPH02270415A (en) * | 1989-04-12 | 1990-11-05 | Tdk Corp | Piezoelectric vibrator and frequency adjustment method |
| WO1994001931A1 (en) * | 1992-07-07 | 1994-01-20 | Tdk Corporation | Piezoelectric ceramic filter circuit and piezoelectric ceramic filter |
| CN116447968A (en) * | 2023-04-14 | 2023-07-18 | 燕山大学 | Arc piezoelectric film plate shape instrument |
-
1978
- 1978-07-27 JP JP9211878A patent/JPS5518190A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109718U (en) * | 1977-02-08 | 1978-09-02 | ||
| JPS6449411A (en) * | 1987-08-20 | 1989-02-23 | Tdk Corp | Manufacture of energy confinement type piezoelectric vibrator |
| JPH01110518U (en) * | 1988-01-20 | 1989-07-26 | ||
| JPH02270415A (en) * | 1989-04-12 | 1990-11-05 | Tdk Corp | Piezoelectric vibrator and frequency adjustment method |
| WO1994001931A1 (en) * | 1992-07-07 | 1994-01-20 | Tdk Corporation | Piezoelectric ceramic filter circuit and piezoelectric ceramic filter |
| CN116447968A (en) * | 2023-04-14 | 2023-07-18 | 燕山大学 | Arc piezoelectric film plate shape instrument |
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