JPS5518190A - Frequency adjustment method for high-coupled piezoelectric oscillator - Google Patents

Frequency adjustment method for high-coupled piezoelectric oscillator

Info

Publication number
JPS5518190A
JPS5518190A JP9211878A JP9211878A JPS5518190A JP S5518190 A JPS5518190 A JP S5518190A JP 9211878 A JP9211878 A JP 9211878A JP 9211878 A JP9211878 A JP 9211878A JP S5518190 A JPS5518190 A JP S5518190A
Authority
JP
Japan
Prior art keywords
electrode
frequency
piezoelectric
thin film
coupled piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9211878A
Other languages
Japanese (ja)
Inventor
Takeshi Inoue
Kazuaki Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9211878A priority Critical patent/JPS5518190A/en
Publication of JPS5518190A publication Critical patent/JPS5518190A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To secure an accurate adjustment of the frequency for the piezoelectric ceramic plate with a simple method by providing the energy enclosing electrode to the high-coupled piezoelectric plate, forming the insulating thin film on the surface of the piezoelectric cermic plate containing the electrode and then polishing or thickening the thin film. CONSTITUTION:Insulating thin film 23 is formed on the surface of one side of high- coupled piezoelectric plate 21 with energy enclosing electrde 22 formed as if film 23 covered over electrode 22. Then film 23 is polished to increase the frequency or thickened through the sputtering or other methods to lower the frequency for adjsutment. At the same time, insulating thin films 27 and 28 are formed on both surfaces of high-coupled piezoelectric electrode 25 on both surfaces of which electrode 26 is formed, and the frequency adjustment is given in the same way as mentioned above. In such way, the characteristics can be adjusted in a high accuracy for the energy enclosing type resonator or filter.
JP9211878A 1978-07-27 1978-07-27 Frequency adjustment method for high-coupled piezoelectric oscillator Pending JPS5518190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9211878A JPS5518190A (en) 1978-07-27 1978-07-27 Frequency adjustment method for high-coupled piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9211878A JPS5518190A (en) 1978-07-27 1978-07-27 Frequency adjustment method for high-coupled piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS5518190A true JPS5518190A (en) 1980-02-08

Family

ID=14045511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9211878A Pending JPS5518190A (en) 1978-07-27 1978-07-27 Frequency adjustment method for high-coupled piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS5518190A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109718U (en) * 1977-02-08 1978-09-02
JPS6449411A (en) * 1987-08-20 1989-02-23 Tdk Corp Manufacture of energy confinement type piezoelectric vibrator
JPH01110518U (en) * 1988-01-20 1989-07-26
JPH02270415A (en) * 1989-04-12 1990-11-05 Tdk Corp Piezoelectric vibrator and frequency adjustment method
WO1994001931A1 (en) * 1992-07-07 1994-01-20 Tdk Corporation Piezoelectric ceramic filter circuit and piezoelectric ceramic filter
CN116447968A (en) * 2023-04-14 2023-07-18 燕山大学 Arc piezoelectric film plate shape instrument

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109718U (en) * 1977-02-08 1978-09-02
JPS6449411A (en) * 1987-08-20 1989-02-23 Tdk Corp Manufacture of energy confinement type piezoelectric vibrator
JPH01110518U (en) * 1988-01-20 1989-07-26
JPH02270415A (en) * 1989-04-12 1990-11-05 Tdk Corp Piezoelectric vibrator and frequency adjustment method
WO1994001931A1 (en) * 1992-07-07 1994-01-20 Tdk Corporation Piezoelectric ceramic filter circuit and piezoelectric ceramic filter
CN116447968A (en) * 2023-04-14 2023-07-18 燕山大学 Arc piezoelectric film plate shape instrument

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