JPS5662247A - Negative type resist - Google Patents

Negative type resist

Info

Publication number
JPS5662247A
JPS5662247A JP14068980A JP14068980A JPS5662247A JP S5662247 A JPS5662247 A JP S5662247A JP 14068980 A JP14068980 A JP 14068980A JP 14068980 A JP14068980 A JP 14068980A JP S5662247 A JPS5662247 A JP S5662247A
Authority
JP
Japan
Prior art keywords
negative type
type resist
resist
negative
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14068980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245970B2 (fr
Inventor
Abuiramu Ari
Kurifuoodo Hofuaa Donarudo
Benjiyamin Koofuman Furanku
Robaato Kuramaa Suteiibun
Maagaretsuto Shiyou Jieen
Hatsuzakisu Maikeru
Jiyoonzu Furetsuchiyaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5662247A publication Critical patent/JPS5662247A/ja
Publication of JPS6245970B2 publication Critical patent/JPS6245970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP14068980A 1979-10-10 1980-10-09 Negative type resist Granted JPS5662247A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8349179A 1979-10-10 1979-10-10

Publications (2)

Publication Number Publication Date
JPS5662247A true JPS5662247A (en) 1981-05-28
JPS6245970B2 JPS6245970B2 (fr) 1987-09-30

Family

ID=22178690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14068980A Granted JPS5662247A (en) 1979-10-10 1980-10-09 Negative type resist

Country Status (3)

Country Link
JP (1) JPS5662247A (fr)
AU (1) AU539640B2 (fr)
CA (1) CA1161685A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125019A (ja) * 1984-11-16 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 集積回路製造方法及びその方法に使用する光導電性フオトレジスト複合体
JP2014119658A (ja) * 2012-12-18 2014-06-30 Shin Etsu Chem Co Ltd ネガ型レジスト材料及びこれを用いたパターン形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2611338B2 (ja) * 1988-06-20 1997-05-21 日本ビクター株式会社 導電性高分子材料

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125019A (ja) * 1984-11-16 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 集積回路製造方法及びその方法に使用する光導電性フオトレジスト複合体
JP2014119658A (ja) * 2012-12-18 2014-06-30 Shin Etsu Chem Co Ltd ネガ型レジスト材料及びこれを用いたパターン形成方法

Also Published As

Publication number Publication date
CA1161685A (fr) 1984-02-07
AU539640B2 (en) 1984-10-11
JPS6245970B2 (fr) 1987-09-30
AU6298380A (en) 1981-04-16

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