JPS5663267A - Phase difference measuring device - Google Patents

Phase difference measuring device

Info

Publication number
JPS5663267A
JPS5663267A JP13827079A JP13827079A JPS5663267A JP S5663267 A JPS5663267 A JP S5663267A JP 13827079 A JP13827079 A JP 13827079A JP 13827079 A JP13827079 A JP 13827079A JP S5663267 A JPS5663267 A JP S5663267A
Authority
JP
Japan
Prior art keywords
signal
phase
output
shifter
phase difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13827079A
Other languages
Japanese (ja)
Other versions
JPS5815740B2 (en
Inventor
Yutaka Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP13827079A priority Critical patent/JPS5815740B2/en
Publication of JPS5663267A publication Critical patent/JPS5663267A/en
Publication of JPS5815740B2 publication Critical patent/JPS5815740B2/en
Expired legal-status Critical Current

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  • Measuring Phase Differences (AREA)

Abstract

PURPOSE: To decrease the phase error caused by the amplitude change of the input signal and thus realize an accurate phase measurement, by compenating the phase error of the input signal selecting narrow band pass filter via the circuit at the rear stage in a light wave range finder ellipsometer or the like.
CONSTITUTION: The S/N is improved for the input signal Si' by the narrow band filter 5, and the signal Si' is supplied to the synchronous rectifier 2 in the form of the signal Si. On the other hand, the reference signal Sr having the same frequency as the signal Si is applied to the rectifier 2 via the phase shifter 1. And the synchronous rectification output V0 is applied to the shifter 1 via the amplifier 3 and in the form of the control signal Ui, and thus a phase shift control is given to secure the output V0 of zero. Accordingly, the output signal of the phase difference measuring circuit 4 shows the phase difference between the signal Si' and the signal Sr if both the input and output signals of the shifter 1 are introduced to the circuit 4.
COPYRIGHT: (C)1981,JPO&Japio
JP13827079A 1979-10-27 1979-10-27 Phase difference measuring device Expired JPS5815740B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13827079A JPS5815740B2 (en) 1979-10-27 1979-10-27 Phase difference measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13827079A JPS5815740B2 (en) 1979-10-27 1979-10-27 Phase difference measuring device

Publications (2)

Publication Number Publication Date
JPS5663267A true JPS5663267A (en) 1981-05-29
JPS5815740B2 JPS5815740B2 (en) 1983-03-28

Family

ID=15217994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13827079A Expired JPS5815740B2 (en) 1979-10-27 1979-10-27 Phase difference measuring device

Country Status (1)

Country Link
JP (1) JPS5815740B2 (en)

Also Published As

Publication number Publication date
JPS5815740B2 (en) 1983-03-28

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