JPS566363A - Regulation of electron gun - Google Patents

Regulation of electron gun

Info

Publication number
JPS566363A
JPS566363A JP8036379A JP8036379A JPS566363A JP S566363 A JPS566363 A JP S566363A JP 8036379 A JP8036379 A JP 8036379A JP 8036379 A JP8036379 A JP 8036379A JP S566363 A JPS566363 A JP S566363A
Authority
JP
Japan
Prior art keywords
electron beam
converter
filament
electron gun
controls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8036379A
Other languages
Japanese (ja)
Other versions
JPS6014462B2 (en
Inventor
Nobuo Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP54080363A priority Critical patent/JPS6014462B2/en
Publication of JPS566363A publication Critical patent/JPS566363A/en
Publication of JPS6014462B2 publication Critical patent/JPS6014462B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To regulate electron beam exactly in short time by controlling the filament current and bias voltage of the electron gun on the basis of a signal complying with the distribution of radiational instensity of electron beam. CONSTITUTION:The electron beam emitted from the filament 1 is scanned in one direction of the shield plate 8, and the electron beam passing through the aperture 7 of the shield plate 8 is detected by the detector 14 and then the output is supplied to and stored in the computer 10 through the amplifier 15, the A-D converter 16, and the interface 11. The computer 10 controls the variable resistor 6 through the interface 11 and the D-A converter 17 and futher controls the variable resistor 19 inside the filament power source 4 through the D-A converter 18.
JP54080363A 1979-06-26 1979-06-26 electron beam device Expired JPS6014462B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54080363A JPS6014462B2 (en) 1979-06-26 1979-06-26 electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54080363A JPS6014462B2 (en) 1979-06-26 1979-06-26 electron beam device

Publications (2)

Publication Number Publication Date
JPS566363A true JPS566363A (en) 1981-01-22
JPS6014462B2 JPS6014462B2 (en) 1985-04-13

Family

ID=13716168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54080363A Expired JPS6014462B2 (en) 1979-06-26 1979-06-26 electron beam device

Country Status (1)

Country Link
JP (1) JPS6014462B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102456A (en) * 1981-12-14 1983-06-18 Jeol Ltd Control of scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102456A (en) * 1981-12-14 1983-06-18 Jeol Ltd Control of scanning electron microscope

Also Published As

Publication number Publication date
JPS6014462B2 (en) 1985-04-13

Similar Documents

Publication Publication Date Title
JPS5516321A (en) Electrostatic radiant type electronic gun
GB1375789A (en)
GB1371114A (en) Method and device for regulating the beam current in an industrial charge-carrier beam device
US4021636A (en) Beam current control device for a technical corpuscular beam apparatus
US5227700A (en) Electron accelerator
JPS566363A (en) Regulation of electron gun
GB739981A (en) Improvements relating to the stabilization of electron discharge devices
GB1175110A (en) Theatre Lighting Control
JPS556829A (en) Electron beam exposure method
JPS5533669A (en) Reference pressure generator
JPS55143841A (en) Oscillating circuit
JPS54129968A (en) Electron gun
GB1194355A (en) Improvements in or relating to Scanning Electron Microscopes.
JPS56114404A (en) Oscillator
GB1052220A (en)
JPS5589738A (en) Auger electron photometry unit
UST961002I4 (en) Electron current regulator for an electron discharge device
FR2401510A1 (en) Stabilised beam travelling wave tube - employs operational amplifier comparator and zener reference source
JPS5621324A (en) X-ray generator
JPS5611332A (en) Hot-cathode ionization vacuum gauge
JPS57201021A (en) Electron ray drawing apparatus
JPS6463250A (en) Electron beam processor
JPS556737A (en) Scan electron microscope
JPS574663A (en) Deflecting circuit
JPS55155454A (en) Scanning electron microscope equipped with electromagnetic radiation type electron gun