JPS5667706A - Detector of direction of object to be inspected - Google Patents

Detector of direction of object to be inspected

Info

Publication number
JPS5667706A
JPS5667706A JP14281779A JP14281779A JPS5667706A JP S5667706 A JPS5667706 A JP S5667706A JP 14281779 A JP14281779 A JP 14281779A JP 14281779 A JP14281779 A JP 14281779A JP S5667706 A JPS5667706 A JP S5667706A
Authority
JP
Japan
Prior art keywords
photodetector
pattern
inspected
diffracted
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14281779A
Other languages
Japanese (ja)
Inventor
Akito Iwamoto
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14281779A priority Critical patent/JPS5667706A/en
Publication of JPS5667706A publication Critical patent/JPS5667706A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To permit the direction of an object to be inspected to be detected from the pattern itself on the object by applying a laser beam to the object on which a normal pattern has been regularly arranged, detecting the light diffracted from the object by a photodetector at a given position, and sensing the direction of the object from the variation of the quantity of the diffracted light obtained when the object is rotated.
CONSTITUTION: An object 10 being inspected, which has a normal grating pattern on the IC wafer, is irradiated by the laser beam from a laser source 11. The light reflected (diffracted) from the object 10 is led through a half-mirror 13 to a photodetector 15 provided on an inspection surface 14. The photodetector 15 comprising, e.g., solar cells is arranged eccentrically with the optical axis. The output signal of the photodetector 15 is sent to a control unit 17, which actuates a pulse motor 16 to operate at a constant speed in order to rotate the object 10. Because the diffraction pattern rotates by the same angle as the grating pattern, the direction of the object is read from the signal from the control unit 17 or the pulse motor 16 is controlled so that the object 10 is placed in a given direction. Therefore, from the pattern itself, the direction can be detected.
COPYRIGHT: (C)1981,JPO&Japio
JP14281779A 1979-11-06 1979-11-06 Detector of direction of object to be inspected Pending JPS5667706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14281779A JPS5667706A (en) 1979-11-06 1979-11-06 Detector of direction of object to be inspected

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14281779A JPS5667706A (en) 1979-11-06 1979-11-06 Detector of direction of object to be inspected

Publications (1)

Publication Number Publication Date
JPS5667706A true JPS5667706A (en) 1981-06-08

Family

ID=15324309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14281779A Pending JPS5667706A (en) 1979-11-06 1979-11-06 Detector of direction of object to be inspected

Country Status (1)

Country Link
JP (1) JPS5667706A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636306U (en) * 1986-06-26 1988-01-16
JPS63271119A (en) * 1987-04-28 1988-11-09 Hamamatsu Photonics Kk Non-contact type rotational frequency detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636306U (en) * 1986-06-26 1988-01-16
JPS63271119A (en) * 1987-04-28 1988-11-09 Hamamatsu Photonics Kk Non-contact type rotational frequency detector

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