JPS5676584A - Manufacture of photoelectric converter - Google Patents

Manufacture of photoelectric converter

Info

Publication number
JPS5676584A
JPS5676584A JP15544179A JP15544179A JPS5676584A JP S5676584 A JPS5676584 A JP S5676584A JP 15544179 A JP15544179 A JP 15544179A JP 15544179 A JP15544179 A JP 15544179A JP S5676584 A JPS5676584 A JP S5676584A
Authority
JP
Japan
Prior art keywords
photoelectric converter
photoelectric
isolating
manufacture
photoelectric converters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15544179A
Other languages
Japanese (ja)
Inventor
Yoichi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15544179A priority Critical patent/JPS5676584A/en
Publication of JPS5676584A publication Critical patent/JPS5676584A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/186—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors having arrangements for blooming suppression

Landscapes

  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE:To obtain a preferable characteristic of a photoelectric converter without affecting other photoelectric converter by isolating a number of photodiodes formed on one substrate via grooves. CONSTITUTION:Reverse-conductivity type impurity containing boron or the like is doped on an N type semiconductor substrate 1, P type regions 2, 3, 4 are formed, N<+> type regions 5, 6 are formed thereon, and a P-N photoelectric converter. Thereafter, isolating grooves 16, 17, 18 are formed by selective etching process, and the photoelectric converters are respectively isolated. Since these photoelectric converters have isolating layers even if the carriers are spattered in the semiconductor, the he photocurrent does not affect other photoelectric converters, thereby the obtaining preferable characteristics.
JP15544179A 1979-11-27 1979-11-27 Manufacture of photoelectric converter Pending JPS5676584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15544179A JPS5676584A (en) 1979-11-27 1979-11-27 Manufacture of photoelectric converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15544179A JPS5676584A (en) 1979-11-27 1979-11-27 Manufacture of photoelectric converter

Publications (1)

Publication Number Publication Date
JPS5676584A true JPS5676584A (en) 1981-06-24

Family

ID=15606093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15544179A Pending JPS5676584A (en) 1979-11-27 1979-11-27 Manufacture of photoelectric converter

Country Status (1)

Country Link
JP (1) JPS5676584A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003124483A (en) * 2001-10-17 2003-04-25 Toyota Motor Corp Photovoltaic element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003124483A (en) * 2001-10-17 2003-04-25 Toyota Motor Corp Photovoltaic element

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