JPS57101714A - Measuring method for film thickness - Google Patents

Measuring method for film thickness

Info

Publication number
JPS57101714A
JPS57101714A JP55179447A JP17944780A JPS57101714A JP S57101714 A JPS57101714 A JP S57101714A JP 55179447 A JP55179447 A JP 55179447A JP 17944780 A JP17944780 A JP 17944780A JP S57101714 A JPS57101714 A JP S57101714A
Authority
JP
Japan
Prior art keywords
film
thickness
oxidized
anodizing
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55179447A
Other languages
Japanese (ja)
Inventor
Shinichiro Ishihara
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55179447A priority Critical patent/JPS57101714A/en
Publication of JPS57101714A publication Critical patent/JPS57101714A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To measure a film thickness with simplicity, by utilizing the phenomenon that thickness of a film oxidized by anodizing increases over thickness of the film before being oxidized at a constant rate. CONSTITUTION:In a process a, an anodizing liquid 4 is dropped on a multilayer thin film 2 piled on a substrate 1. And, in a process b, an anode is oxidized. And, in a process e, height of swelling portion of an anodized film 9 on the multilayer film 2 is measured by using a roughness gauge 11. And finally, by measuring the swelling rate of film thickness of surface first layer by anodizing in advance by using another specimen, thikness of a surface first layer 9' is calculated by the result.
JP55179447A 1980-12-17 1980-12-17 Measuring method for film thickness Pending JPS57101714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55179447A JPS57101714A (en) 1980-12-17 1980-12-17 Measuring method for film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55179447A JPS57101714A (en) 1980-12-17 1980-12-17 Measuring method for film thickness

Publications (1)

Publication Number Publication Date
JPS57101714A true JPS57101714A (en) 1982-06-24

Family

ID=16066012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55179447A Pending JPS57101714A (en) 1980-12-17 1980-12-17 Measuring method for film thickness

Country Status (1)

Country Link
JP (1) JPS57101714A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852486A (en) * 1971-11-02 1973-07-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852486A (en) * 1971-11-02 1973-07-23

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