JPS57102039A - Inspection of semiconductor device - Google Patents

Inspection of semiconductor device

Info

Publication number
JPS57102039A
JPS57102039A JP55178505A JP17850580A JPS57102039A JP S57102039 A JPS57102039 A JP S57102039A JP 55178505 A JP55178505 A JP 55178505A JP 17850580 A JP17850580 A JP 17850580A JP S57102039 A JPS57102039 A JP S57102039A
Authority
JP
Japan
Prior art keywords
inspection
devices
semicondutor
semiconductor device
characteristic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55178505A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118339B2 (2
Inventor
Kazuo Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55178505A priority Critical patent/JPS57102039A/ja
Publication of JPS57102039A publication Critical patent/JPS57102039A/ja
Publication of JPS6118339B2 publication Critical patent/JPS6118339B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55178505A 1980-12-17 1980-12-17 Inspection of semiconductor device Granted JPS57102039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55178505A JPS57102039A (en) 1980-12-17 1980-12-17 Inspection of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55178505A JPS57102039A (en) 1980-12-17 1980-12-17 Inspection of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57102039A true JPS57102039A (en) 1982-06-24
JPS6118339B2 JPS6118339B2 (2) 1986-05-12

Family

ID=16049630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55178505A Granted JPS57102039A (en) 1980-12-17 1980-12-17 Inspection of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57102039A (2)

Also Published As

Publication number Publication date
JPS6118339B2 (2) 1986-05-12

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