JPS57161066A - Removing method for metallic oxide film - Google Patents

Removing method for metallic oxide film

Info

Publication number: JPS57161066A
Authority: JP; Japan
Prior art keywords: stuck; metallic oxide; films; substrate; oxide film
Prior art date: 1981-03-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP4663381A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6332868B2 (2

Inventor

Hideo Kawahara

Koichi Ataka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nippon Sheet Glass Co Ltd

Original Assignee

Nippon Sheet Glass Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-03-30

Filing date

1981-03-30

Publication date

1982-10-04

1981-03-30 Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd

1981-03-30 Priority to JP4663381A priority Critical patent/JPS57161066A/ja

1982-10-04 Publication of JPS57161066A publication Critical patent/JPS57161066A/ja

1988-07-01 Publication of JPS6332868B2 publication Critical patent/JPS6332868B2/ja

Status Granted legal-status Critical Current

Links

229910044991 metal oxide Inorganic materials 0.000 title abstract 4
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 4
239000000758 substrate Substances 0.000 abstract 4
229910052804 chromium Inorganic materials 0.000 abstract 2
229910052742 iron Inorganic materials 0.000 abstract 2
239000000843 powder Substances 0.000 abstract 2
229910052802 copper Inorganic materials 0.000 abstract 1
229910052748 manganese Inorganic materials 0.000 abstract 1
229910052759 nickel Inorganic materials 0.000 abstract 1
229910052725 zinc Inorganic materials 0.000 abstract 1

Landscapes

ing And Chemical Polishing (AREA)

JP4663381A 1981-03-30 1981-03-30 Removing method for metallic oxide film Granted JPS57161066A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP4663381A JPS57161066A (en)	1981-03-30	1981-03-30	Removing method for metallic oxide film

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP4663381A JPS57161066A (en)	1981-03-30	1981-03-30	Removing method for metallic oxide film

Publications (2)

Publication Number	Publication Date
JPS57161066A true JPS57161066A (en)	1982-10-04
JPS6332868B2 JPS6332868B2 (2)	1988-07-01

Family

ID=12752692

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP4663381A Granted JPS57161066A (en)	1981-03-30	1981-03-30	Removing method for metallic oxide film

Country Status (1)

Country	Link
JP (1)	JPS57161066A (2)

1981
- 1981-03-30 JP JP4663381A patent/JPS57161066A/ja active Granted

Also Published As

Publication number	Publication date
JPS6332868B2 (2)	1988-07-01

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