JPS57205341A - Formation of glass photomask - Google Patents
Formation of glass photomaskInfo
- Publication number
- JPS57205341A JPS57205341A JP9190881A JP9190881A JPS57205341A JP S57205341 A JPS57205341 A JP S57205341A JP 9190881 A JP9190881 A JP 9190881A JP 9190881 A JP9190881 A JP 9190881A JP S57205341 A JPS57205341 A JP S57205341A
- Authority
- JP
- Japan
- Prior art keywords
- electroless plated
- pinholes
- free
- film
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title abstract 3
- 230000015572 biosynthetic process Effects 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 abstract 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract 2
- 238000000059 patterning Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 2
- -1 Sb3O5 Inorganic materials 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/3665—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as photomask
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Surface Treatment Of Glass (AREA)
- Chemically Coating (AREA)
Abstract
PURPOSE: To inexpensively form a large number of glass photomasks free from pinholes and having high pattern accuracy by forming an electroless plated multilayer film on an oxide film laid on each substrate and carrying out patterning.
CONSTITUTION: An oxide film of ≥1 kind of oxide selected from SnO2, In2O3, Sb3O5, TiO2, Ta2O5, Nb2O5, SiO2, GeO2 and ZrO2 is laid on each transparent insulator substrate, and an electroless plated film is formed on the oxide film and calcined. Electroless plated films are further formed to form an electroless plated multilayer film free from pinholes and having superior adhesive strength. Patterning in the desired shape and design is then carried out. By this method a glass photomask free from ≥2μm pinholes and having an accurate pattern is obtd. inexpensively.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9190881A JPS57205341A (en) | 1981-06-15 | 1981-06-15 | Formation of glass photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9190881A JPS57205341A (en) | 1981-06-15 | 1981-06-15 | Formation of glass photomask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57205341A true JPS57205341A (en) | 1982-12-16 |
| JPS6161667B2 JPS6161667B2 (en) | 1986-12-26 |
Family
ID=14039673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9190881A Granted JPS57205341A (en) | 1981-06-15 | 1981-06-15 | Formation of glass photomask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57205341A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177502A (en) * | 1986-01-31 | 1987-08-04 | Nippon Soda Co Ltd | Composite oxide thin film having high refractive index and optical interference film |
| WO1995029136A1 (en) * | 1994-04-26 | 1995-11-02 | Thomson Tubes Electroniques | Method of depositing a conducting coating on a glass substrate |
| WO2020179880A1 (en) * | 2019-03-06 | 2020-09-10 | 日本板硝子株式会社 | Glass body |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6313165A (en) * | 1986-07-02 | 1988-01-20 | Harada Kogyo Kk | Switching controller for laser disk player |
| JPS648550A (en) * | 1987-06-30 | 1989-01-12 | Sanyo Electric Co | Video disk reproducing device |
-
1981
- 1981-06-15 JP JP9190881A patent/JPS57205341A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177502A (en) * | 1986-01-31 | 1987-08-04 | Nippon Soda Co Ltd | Composite oxide thin film having high refractive index and optical interference film |
| WO1995029136A1 (en) * | 1994-04-26 | 1995-11-02 | Thomson Tubes Electroniques | Method of depositing a conducting coating on a glass substrate |
| WO2020179880A1 (en) * | 2019-03-06 | 2020-09-10 | 日本板硝子株式会社 | Glass body |
| JPWO2020179880A1 (en) * | 2019-03-06 | 2020-09-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161667B2 (en) | 1986-12-26 |
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