JPS5726407B2 - - Google Patents

Info

Publication number
JPS5726407B2
JPS5726407B2 JP6813377A JP6813377A JPS5726407B2 JP S5726407 B2 JPS5726407 B2 JP S5726407B2 JP 6813377 A JP6813377 A JP 6813377A JP 6813377 A JP6813377 A JP 6813377A JP S5726407 B2 JPS5726407 B2 JP S5726407B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6813377A
Other versions
JPS543473A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6813377A priority Critical patent/JPS543473A/ja
Publication of JPS543473A publication Critical patent/JPS543473A/ja
Publication of JPS5726407B2 publication Critical patent/JPS5726407B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6813377A 1977-06-09 1977-06-09 Manufacture of semiconductor device Granted JPS543473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6813377A JPS543473A (en) 1977-06-09 1977-06-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6813377A JPS543473A (en) 1977-06-09 1977-06-09 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS543473A JPS543473A (en) 1979-01-11
JPS5726407B2 true JPS5726407B2 (ja) 1982-06-04

Family

ID=13364927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6813377A Granted JPS543473A (en) 1977-06-09 1977-06-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS543473A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4187331A (en) * 1978-08-24 1980-02-05 International Business Machines Corp. Fluorine plasma resist image hardening
JPS55103736A (en) * 1979-02-01 1980-08-08 Toshiba Corp Hardening method of proving ink for semiconductor wafer
JPH05166769A (ja) * 1991-12-18 1993-07-02 Kawasaki Steel Corp 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529506B2 (ja) * 1972-07-26 1977-03-16
JPS5731289B2 (ja) * 1974-05-31 1982-07-03

Also Published As

Publication number Publication date
JPS543473A (en) 1979-01-11

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