JPS543473A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS543473A
JPS543473A JP6813377A JP6813377A JPS543473A JP S543473 A JPS543473 A JP S543473A JP 6813377 A JP6813377 A JP 6813377A JP 6813377 A JP6813377 A JP 6813377A JP S543473 A JPS543473 A JP S543473A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
layer
wafer
deterioration layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6813377A
Other languages
English (en)
Other versions
JPS5726407B2 (ja
Inventor
Chuichi Takada
Ryoji Abe
Makoto Serigano
Kuniaki Makabe
Shoji Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6813377A priority Critical patent/JPS543473A/ja
Publication of JPS543473A publication Critical patent/JPS543473A/ja
Publication of JPS5726407B2 publication Critical patent/JPS5726407B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP6813377A 1977-06-09 1977-06-09 Manufacture of semiconductor device Granted JPS543473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6813377A JPS543473A (en) 1977-06-09 1977-06-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6813377A JPS543473A (en) 1977-06-09 1977-06-09 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS543473A true JPS543473A (en) 1979-01-11
JPS5726407B2 JPS5726407B2 (ja) 1982-06-04

Family

ID=13364927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6813377A Granted JPS543473A (en) 1977-06-09 1977-06-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS543473A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532095A (en) * 1978-08-24 1980-03-06 Ibm Stabilizing resist image
JPS55103736A (en) * 1979-02-01 1980-08-08 Toshiba Corp Hardening method of proving ink for semiconductor wafer
US5372677A (en) * 1991-12-18 1994-12-13 Kawasaki Steel Corporation Method of manufacturing semiconductor devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933573A (ja) * 1972-07-26 1974-03-28
JPS50154066A (ja) * 1974-05-31 1975-12-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933573A (ja) * 1972-07-26 1974-03-28
JPS50154066A (ja) * 1974-05-31 1975-12-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532095A (en) * 1978-08-24 1980-03-06 Ibm Stabilizing resist image
JPS55103736A (en) * 1979-02-01 1980-08-08 Toshiba Corp Hardening method of proving ink for semiconductor wafer
US5372677A (en) * 1991-12-18 1994-12-13 Kawasaki Steel Corporation Method of manufacturing semiconductor devices

Also Published As

Publication number Publication date
JPS5726407B2 (ja) 1982-06-04

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