JPS5730902A - Electric capacity type surface roughness measuring electrode - Google Patents

Electric capacity type surface roughness measuring electrode

Info

Publication number
JPS5730902A
JPS5730902A JP10654880A JP10654880A JPS5730902A JP S5730902 A JPS5730902 A JP S5730902A JP 10654880 A JP10654880 A JP 10654880A JP 10654880 A JP10654880 A JP 10654880A JP S5730902 A JPS5730902 A JP S5730902A
Authority
JP
Japan
Prior art keywords
metal plate
thin metal
measuring surface
forming part
electric capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10654880A
Other languages
Japanese (ja)
Inventor
Shohachiro Yamazaki
Ichiro Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YAMAZAKI SEIKI KENKYUSHO KK
Original Assignee
YAMAZAKI SEIKI KENKYUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YAMAZAKI SEIKI KENKYUSHO KK filed Critical YAMAZAKI SEIKI KENKYUSHO KK
Priority to JP10654880A priority Critical patent/JPS5730902A/en
Publication of JPS5730902A publication Critical patent/JPS5730902A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To measure roughness of an object to be measured in a simple manner by a constitution which evenly contacts with the top of convex parts of the irregular surface of the object to be measured but does not sink into the concave part. CONSTITUTION:A thin metal plate 3 formed with a tape shaped flexible material is attached to a bottom surface of an electrode base body 1. Said thin metal plate 3 is composed of an attaching part 4 which is attached to the electrode base body 1, resilient leg parts 5 and 5 which are bent outward, and a measuring surface forming part 6 which substantially restricts the area of the measuring surface. The attaching part 4 of the thin metal plate 3 is connected to a positive side electric circuit. A resilient body 9 is interposed between the attaching part 4 of the thin metal plate 3 and the measuring surface forming part 6. An insulating film 11 is placed beneath the outer surface of the measuring surface forming part 6 of the thin metal plate 3. Said insulating film 11 has a uniform thickness and constant elasticity.
JP10654880A 1980-08-02 1980-08-02 Electric capacity type surface roughness measuring electrode Pending JPS5730902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10654880A JPS5730902A (en) 1980-08-02 1980-08-02 Electric capacity type surface roughness measuring electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10654880A JPS5730902A (en) 1980-08-02 1980-08-02 Electric capacity type surface roughness measuring electrode

Publications (1)

Publication Number Publication Date
JPS5730902A true JPS5730902A (en) 1982-02-19

Family

ID=14436402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10654880A Pending JPS5730902A (en) 1980-08-02 1980-08-02 Electric capacity type surface roughness measuring electrode

Country Status (1)

Country Link
JP (1) JPS5730902A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134405U (en) * 1984-07-31 1986-03-03 株式会社 山崎精機研究所 Structure of measurement electrode in capacitive surface roughness measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134405U (en) * 1984-07-31 1986-03-03 株式会社 山崎精機研究所 Structure of measurement electrode in capacitive surface roughness measuring instrument

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