JPS5732360A - Method and device for regeneration of chemical copper plating solution - Google Patents

Method and device for regeneration of chemical copper plating solution

Info

Publication number
JPS5732360A
JPS5732360A JP10773980A JP10773980A JPS5732360A JP S5732360 A JPS5732360 A JP S5732360A JP 10773980 A JP10773980 A JP 10773980A JP 10773980 A JP10773980 A JP 10773980A JP S5732360 A JPS5732360 A JP S5732360A
Authority
JP
Japan
Prior art keywords
ions
plating
vessel
soln
harmful
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10773980A
Other languages
Japanese (ja)
Other versions
JPS5937745B2 (en
Inventor
Hiroshi Kikuchi
Hitoshi Oka
Ataru Yokono
Haruo Suzuki
Toyofusa Yoshimura
Akira Matsuo
Osamu Miyazawa
Isamu Tanaka
Tokio Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10773980A priority Critical patent/JPS5937745B2/en
Publication of JPS5732360A publication Critical patent/JPS5732360A/en
Publication of JPS5937745B2 publication Critical patent/JPS5937745B2/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis

Landscapes

  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Health & Medical Sciences (AREA)
  • Urology & Nephrology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemically Coating (AREA)

Abstract

PURPOSE: To selectively remove harmful ions without causing change of properties of a chemical copper plating soln. wherein harmful ions are accumulated through plating operation, and regenerate the plating soln. by subjecting said plating soln. to combined treatments of ion exchanging and electrodialysis.
CONSTITUTION: Cu ions, reducing agents and hydroxyl ions are replenished respectively from replenishing vessels 2, 3, 4, into a chemical Cu plating vessel 1, whereby chemical Cu plating is accomplished. To remove the harmful Na, So4, HCOO, CO3 ions, etc. having been accumulated by the plating, first the soln. is introduced into an ion exchange vessel 5, where it is allowed to contact with anion exchange resins to exchange SO4 ions and CO3 ions to HCOO ions. Next, it is introduced into an electrodialysis vessel 6, where the HCOO ions and harmful ions of alkali metal ions such as Na are separated from chelated Cu ions, chelating agents, etc. as essential components and are selectively removed by electrodialysis, after which they are reflowed to a concd. liquid vessel 7. The regenerated plating soln. is reflowed to the vessel 1.
COPYRIGHT: (C)1982,JPO&Japio
JP10773980A 1980-08-07 1980-08-07 Recycling treatment method and equipment for chemical copper plating solution Expired JPS5937745B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10773980A JPS5937745B2 (en) 1980-08-07 1980-08-07 Recycling treatment method and equipment for chemical copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10773980A JPS5937745B2 (en) 1980-08-07 1980-08-07 Recycling treatment method and equipment for chemical copper plating solution

Publications (2)

Publication Number Publication Date
JPS5732360A true JPS5732360A (en) 1982-02-22
JPS5937745B2 JPS5937745B2 (en) 1984-09-11

Family

ID=14466722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10773980A Expired JPS5937745B2 (en) 1980-08-07 1980-08-07 Recycling treatment method and equipment for chemical copper plating solution

Country Status (1)

Country Link
JP (1) JPS5937745B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05306471A (en) * 1991-05-17 1993-11-19 Hitachi Kasei Techno Plant Kk Method and apparatus for producing electroless copper plating solution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05306471A (en) * 1991-05-17 1993-11-19 Hitachi Kasei Techno Plant Kk Method and apparatus for producing electroless copper plating solution

Also Published As

Publication number Publication date
JPS5937745B2 (en) 1984-09-11

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