JPS5738540A - Field emission type ion source - Google Patents

Field emission type ion source

Info

Publication number
JPS5738540A
JPS5738540A JP11370980A JP11370980A JPS5738540A JP S5738540 A JPS5738540 A JP S5738540A JP 11370980 A JP11370980 A JP 11370980A JP 11370980 A JP11370980 A JP 11370980A JP S5738540 A JPS5738540 A JP S5738540A
Authority
JP
Japan
Prior art keywords
section
ion generation
main body
raw material
protruded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11370980A
Other languages
Japanese (ja)
Other versions
JPS6362860B2 (en
Inventor
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11370980A priority Critical patent/JPS5738540A/en
Publication of JPS5738540A publication Critical patent/JPS5738540A/en
Publication of JPS6362860B2 publication Critical patent/JPS6362860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To increase reproductivity of ion generation by forming a pyramid- shaped protruded section at the lower part of the electrode main body of a single crystal substance on the upper surface side of which the collection section of fused ion generation raw material is provided and providing a penetration hole which leads the ion generation raw material to the tip of the protruded section. CONSTITUTION:A pyramid-shaped protruded section 10a is provided at the lower prt of an electrode main body 10 consisting of silicone single crystal substances by anisotropy etching and a collection section 11 is formed on the upper part except the peripheral section by etching. Four penetration holes 12 are provided at the lower part of the electrode main body 10 between the peripheral section of the protruded section 10a and collection section 11 and an ion generation raw material 7 is housed in the collection section 11. An external electrode 5 is arranged at the lower part of the main body 10 and a power source 6 is connected. As a result, the shape and diameter of each section can accurately be preset and the reproductivity of ion generation be improved.
JP11370980A 1980-08-19 1980-08-19 Field emission type ion source Granted JPS5738540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11370980A JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11370980A JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Publications (2)

Publication Number Publication Date
JPS5738540A true JPS5738540A (en) 1982-03-03
JPS6362860B2 JPS6362860B2 (en) 1988-12-05

Family

ID=14619167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11370980A Granted JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Country Status (1)

Country Link
JP (1) JPS5738540A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873947A (en) * 1981-10-26 1983-05-04 Jeol Ltd Ion gun
JPS6241748A (en) * 1985-08-13 1987-02-23 太平洋セメント株式会社 Manufacture of incombustible inorganic construction material
FR2662543A1 (en) * 1990-05-22 1991-11-29 Amp Inc ASSEMBLY FOR ESTABLISHING A SEPARABLE ELECTRICAL PATH BETWEEN A ZONE SITUATED ON A SUBSTRATE AND A ZONE LOCATED ON ANOTHER SUBSTRATE.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873947A (en) * 1981-10-26 1983-05-04 Jeol Ltd Ion gun
JPS6241748A (en) * 1985-08-13 1987-02-23 太平洋セメント株式会社 Manufacture of incombustible inorganic construction material
FR2662543A1 (en) * 1990-05-22 1991-11-29 Amp Inc ASSEMBLY FOR ESTABLISHING A SEPARABLE ELECTRICAL PATH BETWEEN A ZONE SITUATED ON A SUBSTRATE AND A ZONE LOCATED ON ANOTHER SUBSTRATE.

Also Published As

Publication number Publication date
JPS6362860B2 (en) 1988-12-05

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