JPS574091B2 - - Google Patents
Info
- Publication number
- JPS574091B2 JPS574091B2 JP1706475A JP1706475A JPS574091B2 JP S574091 B2 JPS574091 B2 JP S574091B2 JP 1706475 A JP1706475 A JP 1706475A JP 1706475 A JP1706475 A JP 1706475A JP S574091 B2 JPS574091 B2 JP S574091B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50017064A JPS51126072A (en) | 1975-02-10 | 1975-02-10 | Pattern formation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50017064A JPS51126072A (en) | 1975-02-10 | 1975-02-10 | Pattern formation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51126072A JPS51126072A (en) | 1976-11-02 |
| JPS574091B2 true JPS574091B2 (2) | 1982-01-25 |
Family
ID=11933540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50017064A Granted JPS51126072A (en) | 1975-02-10 | 1975-02-10 | Pattern formation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51126072A (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60234266A (ja) * | 1984-05-07 | 1985-11-20 | Matsushita Electric Ind Co Ltd | 円盤状記録媒体上の記録の再生装置 |
| JPS6266494A (ja) * | 1985-09-18 | 1987-03-25 | Sony Corp | ビデオデイスク再生装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02310A (ja) * | 1987-12-29 | 1990-01-05 | Canon Inc | Ｘ線用マスクとそれを用いた露光方法 |
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1975
- 1975-02-10 JP JP50017064A patent/JPS51126072A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60234266A (ja) * | 1984-05-07 | 1985-11-20 | Matsushita Electric Ind Co Ltd | 円盤状記録媒体上の記録の再生装置 |
| JPS6266494A (ja) * | 1985-09-18 | 1987-03-25 | Sony Corp | ビデオデイスク再生装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51126072A (en) | 1976-11-02 |