JPS51126072A - Pattern formation equipment - Google Patents

Pattern formation equipment

Info

Publication number
JPS51126072A
JPS51126072A JP50017064A JP1706475A JPS51126072A JP S51126072 A JPS51126072 A JP S51126072A JP 50017064 A JP50017064 A JP 50017064A JP 1706475 A JP1706475 A JP 1706475A JP S51126072 A JPS51126072 A JP S51126072A
Authority
JP
Japan
Prior art keywords
pattern formation
formation equipment
equipment
pattern
microscopic pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50017064A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574091B2 (2
Inventor
Toru Funayama
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50017064A priority Critical patent/JPS51126072A/ja
Publication of JPS51126072A publication Critical patent/JPS51126072A/ja
Publication of JPS574091B2 publication Critical patent/JPS574091B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50017064A 1975-02-10 1975-02-10 Pattern formation equipment Granted JPS51126072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50017064A JPS51126072A (en) 1975-02-10 1975-02-10 Pattern formation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50017064A JPS51126072A (en) 1975-02-10 1975-02-10 Pattern formation equipment

Publications (2)

Publication Number Publication Date
JPS51126072A true JPS51126072A (en) 1976-11-02
JPS574091B2 JPS574091B2 (2) 1982-01-25

Family

ID=11933540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50017064A Granted JPS51126072A (en) 1975-02-10 1975-02-10 Pattern formation equipment

Country Status (1)

Country Link
JP (1) JPS51126072A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02310A (ja) * 1987-12-29 1990-01-05 Canon Inc Ｘ線用マスクとそれを用いた露光方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60234266A (ja) * 1984-05-07 1985-11-20 Matsushita Electric Ind Co Ltd 円盤状記録媒体上の記録の再生装置
JPS6266494A (ja) * 1985-09-18 1987-03-25 Sony Corp ビデオデイスク再生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02310A (ja) * 1987-12-29 1990-01-05 Canon Inc Ｘ線用マスクとそれを用いた露光方法

Also Published As

Publication number Publication date
JPS574091B2 (2) 1982-01-25

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