JPS574144A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS574144A
JPS574144A JP7815880A JP7815880A JPS574144A JP S574144 A JPS574144 A JP S574144A JP 7815880 A JP7815880 A JP 7815880A JP 7815880 A JP7815880 A JP 7815880A JP S574144 A JPS574144 A JP S574144A
Authority
JP
Japan
Prior art keywords
pad
wiring
film
prevent
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7815880A
Other languages
English (en)
Other versions
JPS5925387B2 (ja
Inventor
Akira Kuromaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55078158A priority Critical patent/JPS5925387B2/ja
Priority to GB8116777A priority patent/GB2078442B/en
Priority to DE19813122740 priority patent/DE3122740A1/de
Publication of JPS574144A publication Critical patent/JPS574144A/ja
Publication of JPS5925387B2 publication Critical patent/JPS5925387B2/ja
Priority to US06/649,955 priority patent/US4539582A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
    • H10W72/07553—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/59—Bond pads specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/931—Shapes of bond pads
    • H10W72/934—Cross-sectional shape, i.e. in side view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/981—Auxiliary members, e.g. spacers
    • H10W72/983—Reinforcing structures, e.g. collars

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
JP55078158A 1980-06-10 1980-06-10 半導体装置 Expired JPS5925387B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP55078158A JPS5925387B2 (ja) 1980-06-10 1980-06-10 半導体装置
GB8116777A GB2078442B (en) 1980-06-10 1981-06-02 A semiconductor device bonding pad
DE19813122740 DE3122740A1 (de) 1980-06-10 1981-06-09 Halbleiterbauelement
US06/649,955 US4539582A (en) 1980-06-10 1984-09-11 Anti-short bonding pad structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55078158A JPS5925387B2 (ja) 1980-06-10 1980-06-10 半導体装置

Publications (2)

Publication Number Publication Date
JPS574144A true JPS574144A (en) 1982-01-09
JPS5925387B2 JPS5925387B2 (ja) 1984-06-16

Family

ID=13654105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55078158A Expired JPS5925387B2 (ja) 1980-06-10 1980-06-10 半導体装置

Country Status (4)

Country Link
US (1) US4539582A (ja)
JP (1) JPS5925387B2 (ja)
DE (1) DE3122740A1 (ja)
GB (1) GB2078442B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01201929A (ja) * 1988-02-05 1989-08-14 Mitsubishi Electric Corp ワイヤボンデイングパッドの組立体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6555757B2 (en) * 2000-04-10 2003-04-29 Ngk Spark Plug Co., Ltd. Pin solder jointed to a resin substrate, made having a predetermined hardness and dimensions

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1099930A (en) * 1966-05-31 1968-01-17 Fairchild Camera Instr Co Improvements in or relating to semiconductor devices
US3717567A (en) * 1967-05-29 1973-02-20 A Bodine Use of sonic resonat energy in electrical machining
NL159822B (nl) * 1969-01-02 1979-03-15 Philips Nv Halfgeleiderinrichting.
US3721838A (en) * 1970-12-21 1973-03-20 Ibm Repairable semiconductor circuit element and method of manufacture
JPS5028763A (ja) * 1973-07-13 1975-03-24
DE2348323A1 (de) * 1973-09-26 1975-04-03 Licentia Gmbh Integrierte festkoerperschaltung mit einer vielzahl von bauelementen in einem gemeinsamen halbleiterkoerper
US4188438A (en) * 1975-06-02 1980-02-12 National Semiconductor Corporation Antioxidant coating of copper parts for thermal compression gang bonding of semiconductive devices
JPS5851425B2 (ja) * 1975-08-22 1983-11-16 株式会社日立製作所 ハンドウタイソウチ
JPS583380B2 (ja) * 1977-03-04 1983-01-21 株式会社日立製作所 半導体装置とその製造方法
JPS53123074A (en) * 1977-04-01 1978-10-27 Nec Corp Semiconductor device
JPS5918870B2 (ja) * 1977-05-15 1984-05-01 財団法人半導体研究振興会 半導体集積回路
DE2727319A1 (de) * 1977-06-16 1979-01-04 Nippon Electric Co Halbleiteranordnung mit einer hoeckerfoermigen anschlusselektrode
JPS5459080A (en) * 1977-10-19 1979-05-12 Nec Corp Semiconductor device
NL184549C (nl) * 1978-01-27 1989-08-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting.
JPS54139374A (en) * 1978-04-21 1979-10-29 Toshiba Corp Semiconductor device
US4228447A (en) * 1979-02-12 1980-10-14 Tektronix, Inc. Submicron channel length MOS inverter with depletion-mode load transistor
JPS5745259A (en) * 1980-09-01 1982-03-15 Hitachi Ltd Resin sealing type semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01201929A (ja) * 1988-02-05 1989-08-14 Mitsubishi Electric Corp ワイヤボンデイングパッドの組立体

Also Published As

Publication number Publication date
US4539582A (en) 1985-09-03
GB2078442A (en) 1982-01-06
DE3122740A1 (de) 1982-03-18
DE3122740C2 (ja) 1988-10-20
GB2078442B (en) 1985-05-30
JPS5925387B2 (ja) 1984-06-16

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