JPS574145A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS574145A
JPS574145A JP7821080A JP7821080A JPS574145A JP S574145 A JPS574145 A JP S574145A JP 7821080 A JP7821080 A JP 7821080A JP 7821080 A JP7821080 A JP 7821080A JP S574145 A JPS574145 A JP S574145A
Authority
JP
Japan
Prior art keywords
epitaxial layer
film
nitrization
substrate
make
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7821080A
Other languages
English (en)
Inventor
Natsuo Tsubouchi
Masahiko Denda
Shigeji Kinoshita
Yoshikazu Obayashi
Shinichi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7821080A priority Critical patent/JPS574145A/ja
Publication of JPS574145A publication Critical patent/JPS574145A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP7821080A 1980-06-09 1980-06-09 Manufacturing process of semiconductor device Pending JPS574145A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7821080A JPS574145A (en) 1980-06-09 1980-06-09 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7821080A JPS574145A (en) 1980-06-09 1980-06-09 Manufacturing process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS574145A true JPS574145A (en) 1982-01-09

Family

ID=13655675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7821080A Pending JPS574145A (en) 1980-06-09 1980-06-09 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS574145A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498175A (ja) * 1972-05-10 1974-01-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498175A (ja) * 1972-05-10 1974-01-24

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