JPS5747331A - Treatment of sheet - Google Patents
Treatment of sheetInfo
- Publication number
- JPS5747331A JPS5747331A JP12204380A JP12204380A JPS5747331A JP S5747331 A JPS5747331 A JP S5747331A JP 12204380 A JP12204380 A JP 12204380A JP 12204380 A JP12204380 A JP 12204380A JP S5747331 A JPS5747331 A JP S5747331A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- plasma polymerization
- polymer
- substance
- decomposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920000642 polymer Polymers 0.000 abstract 4
- 238000000354 decomposition reaction Methods 0.000 abstract 3
- 238000006116 polymerization reaction Methods 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 3
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 238000000992 sputter etching Methods 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- 238000002309 gasification Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000000178 monomer Substances 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/125—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
- B01D69/127—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
PURPOSE:A high-polymer substance is etched by sputtering, then the gas formed by decomposition is polymerized on the sheet surface, thus enabling the plasma polymerization of a substance difficult in monomer gasification and increasing the adhesion of a polymer thin film. CONSTITUTION:In the sputter-etching chamber 1a, a high-polymer substance A such as a fluorine resin material is etched by sputtering an the decomposition gas formed by the sputter-etching is introduced into the plasma polymerization chamber 1b. Then, the decomposition gas is subjected to plasma polymerization on the surface of the sheet F to form the polymer thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12204380A JPS6039293B2 (en) | 1980-09-02 | 1980-09-02 | How to process sheets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12204380A JPS6039293B2 (en) | 1980-09-02 | 1980-09-02 | How to process sheets |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5747331A true JPS5747331A (en) | 1982-03-18 |
| JPS6039293B2 JPS6039293B2 (en) | 1985-09-05 |
Family
ID=14826186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12204380A Expired JPS6039293B2 (en) | 1980-09-02 | 1980-09-02 | How to process sheets |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6039293B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02142593U (en) * | 1989-05-01 | 1990-12-04 |
-
1980
- 1980-09-02 JP JP12204380A patent/JPS6039293B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6039293B2 (en) | 1985-09-05 |
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