JPS5747331A - Treatment of sheet - Google Patents

Treatment of sheet

Info

Publication number
JPS5747331A
JPS5747331A JP12204380A JP12204380A JPS5747331A JP S5747331 A JPS5747331 A JP S5747331A JP 12204380 A JP12204380 A JP 12204380A JP 12204380 A JP12204380 A JP 12204380A JP S5747331 A JPS5747331 A JP S5747331A
Authority
JP
Japan
Prior art keywords
sheet
plasma polymerization
polymer
substance
decomposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12204380A
Other languages
Japanese (ja)
Other versions
JPS6039293B2 (en
Inventor
Minoru Ezoe
Takashi Ichinose
Masao Abe
Takahiko Moriuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP12204380A priority Critical patent/JPS6039293B2/en
Publication of JPS5747331A publication Critical patent/JPS5747331A/en
Publication of JPS6039293B2 publication Critical patent/JPS6039293B2/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/125—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
    • B01D69/127—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE:A high-polymer substance is etched by sputtering, then the gas formed by decomposition is polymerized on the sheet surface, thus enabling the plasma polymerization of a substance difficult in monomer gasification and increasing the adhesion of a polymer thin film. CONSTITUTION:In the sputter-etching chamber 1a, a high-polymer substance A such as a fluorine resin material is etched by sputtering an the decomposition gas formed by the sputter-etching is introduced into the plasma polymerization chamber 1b. Then, the decomposition gas is subjected to plasma polymerization on the surface of the sheet F to form the polymer thin film.
JP12204380A 1980-09-02 1980-09-02 How to process sheets Expired JPS6039293B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12204380A JPS6039293B2 (en) 1980-09-02 1980-09-02 How to process sheets

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12204380A JPS6039293B2 (en) 1980-09-02 1980-09-02 How to process sheets

Publications (2)

Publication Number Publication Date
JPS5747331A true JPS5747331A (en) 1982-03-18
JPS6039293B2 JPS6039293B2 (en) 1985-09-05

Family

ID=14826186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12204380A Expired JPS6039293B2 (en) 1980-09-02 1980-09-02 How to process sheets

Country Status (1)

Country Link
JP (1) JPS6039293B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142593U (en) * 1989-05-01 1990-12-04

Also Published As

Publication number Publication date
JPS6039293B2 (en) 1985-09-05

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