JPS575329A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS575329A
JPS575329A JP8001080A JP8001080A JPS575329A JP S575329 A JPS575329 A JP S575329A JP 8001080 A JP8001080 A JP 8001080A JP 8001080 A JP8001080 A JP 8001080A JP S575329 A JPS575329 A JP S575329A
Authority
JP
Japan
Prior art keywords
film
hole
etching
pattern
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8001080A
Other languages
English (en)
Inventor
Yukihiro Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8001080A priority Critical patent/JPS575329A/ja
Publication of JPS575329A publication Critical patent/JPS575329A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP8001080A 1980-06-13 1980-06-13 Manufacture of semiconductor device Pending JPS575329A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8001080A JPS575329A (en) 1980-06-13 1980-06-13 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8001080A JPS575329A (en) 1980-06-13 1980-06-13 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS575329A true JPS575329A (en) 1982-01-12

Family

ID=13706347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8001080A Pending JPS575329A (en) 1980-06-13 1980-06-13 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS575329A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6051847U (ja) * 1983-09-17 1985-04-11 株式会社明電舎 開閉器のばね蓄勢装置
JPS6051848U (ja) * 1983-09-17 1985-04-11 株式会社明電舎 開閉器のばね蓄勢装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6051847U (ja) * 1983-09-17 1985-04-11 株式会社明電舎 開閉器のばね蓄勢装置
JPS6051848U (ja) * 1983-09-17 1985-04-11 株式会社明電舎 開閉器のばね蓄勢装置

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