JPS575344A - Detecting method for pinhole of insulating film - Google Patents

Detecting method for pinhole of insulating film

Info

Publication number
JPS575344A
JPS575344A JP8000680A JP8000680A JPS575344A JP S575344 A JPS575344 A JP S575344A JP 8000680 A JP8000680 A JP 8000680A JP 8000680 A JP8000680 A JP 8000680A JP S575344 A JPS575344 A JP S575344A
Authority
JP
Japan
Prior art keywords
pinhole
insulating film
electrodes
film
etchant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8000680A
Other languages
Japanese (ja)
Inventor
Makoto Serigano
Hideo Tamura
Tsukuru Sano
Ryoji Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8000680A priority Critical patent/JPS575344A/en
Publication of JPS575344A publication Critical patent/JPS575344A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To detect the pinhole of an insulating film by forming a plurality of electrodes on the film formed on a conductive substrate and dipping it in an etchant. CONSTITUTION:A pinhole detecting insulating film 22 is formed on a conductive substrate 21, and electrodes 23 are arranged at the same pitch on the film 22. When a semiconductor substrate thus formed is, for example, dipped in a weak etchant made of about 2% of hydrofluoric acid, the electrodes arranged on the insulating film in which the pinhole exists reach the pinhole since the etchant is immersed in the boundary between the electrodes 23 and the film 22, and are etched and erased in approx. 5min. The electrodes arranged on the part in which no pinhole exists are retained without being etched. Thus, the pinhole can be simply detected without application of a voltage to the substrate.
JP8000680A 1980-06-13 1980-06-13 Detecting method for pinhole of insulating film Pending JPS575344A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8000680A JPS575344A (en) 1980-06-13 1980-06-13 Detecting method for pinhole of insulating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8000680A JPS575344A (en) 1980-06-13 1980-06-13 Detecting method for pinhole of insulating film

Publications (1)

Publication Number Publication Date
JPS575344A true JPS575344A (en) 1982-01-12

Family

ID=13706236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8000680A Pending JPS575344A (en) 1980-06-13 1980-06-13 Detecting method for pinhole of insulating film

Country Status (1)

Country Link
JP (1) JPS575344A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015510243A (en) * 2012-02-07 2015-04-02 オヴォニック バッテリー カンパニー インコーポレイテッド Rechargeable battery cell with improved high temperature performance

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153983A (en) * 1974-05-31 1975-12-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153983A (en) * 1974-05-31 1975-12-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015510243A (en) * 2012-02-07 2015-04-02 オヴォニック バッテリー カンパニー インコーポレイテッド Rechargeable battery cell with improved high temperature performance

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