JPS5754803A - Inspecting device for transparent pattern - Google Patents

Inspecting device for transparent pattern

Info

Publication number
JPS5754803A
JPS5754803A JP12919280A JP12919280A JPS5754803A JP S5754803 A JPS5754803 A JP S5754803A JP 12919280 A JP12919280 A JP 12919280A JP 12919280 A JP12919280 A JP 12919280A JP S5754803 A JPS5754803 A JP S5754803A
Authority
JP
Japan
Prior art keywords
lights
reflection
transparent pattern
incident
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12919280A
Other languages
Japanese (ja)
Inventor
Masaaki Tamaya
Minoru Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12919280A priority Critical patent/JPS5754803A/en
Publication of JPS5754803A publication Critical patent/JPS5754803A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To enable to perform an easy and accurate visual inspection of a transparent pattern, by a method wherein a polarizing plate, which produces a P-polarized light, is located between at least either lights, wherewith a substrate is irradiated, or lights entering into eyes after reflection. CONSTITUTION:In case normal lights L are projected on an electrode plate 3, in which a transparent pattern 2 is formed on a glass substrate 1 to inspect the transparent pattern from the reflection light, a P-polarizing plate 4 is located between incident lights L8. If possible, the incident light phi enter at preferably 50-60 deg.. Reflection lights 6, into which the surface of the substrate itself reflects P-polarized lights to produce them, are remarkably reduced in an amount in comparision with that of reflection lights 7 which are pattern 2 reflects, and can be explicitly confirmed in a visual manner. The P-polarizing plates are mounted at both of the incident lights and the reflection lights to form an irradiation light source into a dispersion light source, and this improves a contrast and widens a range within which the eyes can move.
JP12919280A 1980-09-19 1980-09-19 Inspecting device for transparent pattern Pending JPS5754803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12919280A JPS5754803A (en) 1980-09-19 1980-09-19 Inspecting device for transparent pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12919280A JPS5754803A (en) 1980-09-19 1980-09-19 Inspecting device for transparent pattern

Publications (1)

Publication Number Publication Date
JPS5754803A true JPS5754803A (en) 1982-04-01

Family

ID=15003413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12919280A Pending JPS5754803A (en) 1980-09-19 1980-09-19 Inspecting device for transparent pattern

Country Status (1)

Country Link
JP (1) JPS5754803A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60184308A (en) * 1984-03-01 1985-09-19 株式会社クボタ Automatic running work machine
JPS6131909A (en) * 1984-07-25 1986-02-14 Hitachi Ltd Three-dimensional shape detection device and method for metal objects
JPS63187058A (en) * 1987-01-27 1988-08-02 富士電機株式会社 Refrigerator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60184308A (en) * 1984-03-01 1985-09-19 株式会社クボタ Automatic running work machine
JPS6131909A (en) * 1984-07-25 1986-02-14 Hitachi Ltd Three-dimensional shape detection device and method for metal objects
JPS63187058A (en) * 1987-01-27 1988-08-02 富士電機株式会社 Refrigerator

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