JPS5759111A - Measuring method for film thickness - Google Patents

Measuring method for film thickness

Info

Publication number
JPS5759111A
JPS5759111A JP55134906A JP13490680A JPS5759111A JP S5759111 A JPS5759111 A JP S5759111A JP 55134906 A JP55134906 A JP 55134906A JP 13490680 A JP13490680 A JP 13490680A JP S5759111 A JPS5759111 A JP S5759111A
Authority
JP
Japan
Prior art keywords
light
pressure
film
container
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55134906A
Other languages
Japanese (ja)
Other versions
JPS6037402B2 (en
Inventor
Shigemi Furubiki
Kunio Hirao
Hiroyuki Tokumasu
Mitsuharu Kamikawaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13490680A priority Critical patent/JPS6037402B2/en
Publication of JPS5759111A publication Critical patent/JPS5759111A/en
Publication of JPS6037402B2 publication Critical patent/JPS6037402B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To measure the thickness of a film nondestructively by irradiating a thin- film sample, contained in a container held under constant pressure with constant capacity, with light and by detecting variations in pressure in the container. CONSTITUTION:Light from a light source 1 is passed through a lens 2 and a monochromatic meter 3 to obtain monochromatic light, which is projected on a sample S in a measurement container 6 through a chopper 4 and a lens 5. Variations in pressure originating from the generation of heat due to light absorption are amplified by a lock-in amplifier 10, synchronizing with the chopper 4, after passing through a pressure sensor 8 and a preamplifier 9, and its output is sent to a computer 11 and a recorder 12. Thus, the film thickness is measured nondestructively.
JP13490680A 1980-09-27 1980-09-27 How to measure film thickness Expired JPS6037402B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13490680A JPS6037402B2 (en) 1980-09-27 1980-09-27 How to measure film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13490680A JPS6037402B2 (en) 1980-09-27 1980-09-27 How to measure film thickness

Publications (2)

Publication Number Publication Date
JPS5759111A true JPS5759111A (en) 1982-04-09
JPS6037402B2 JPS6037402B2 (en) 1985-08-26

Family

ID=15139286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13490680A Expired JPS6037402B2 (en) 1980-09-27 1980-09-27 How to measure film thickness

Country Status (1)

Country Link
JP (1) JPS6037402B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229577A (en) * 1989-03-02 1990-09-12 Mitsubishi Electric Corp Coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229577A (en) * 1989-03-02 1990-09-12 Mitsubishi Electric Corp Coating device

Also Published As

Publication number Publication date
JPS6037402B2 (en) 1985-08-26

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