JPS5759322A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5759322A
JPS5759322A JP55134548A JP13454880A JPS5759322A JP S5759322 A JPS5759322 A JP S5759322A JP 55134548 A JP55134548 A JP 55134548A JP 13454880 A JP13454880 A JP 13454880A JP S5759322 A JPS5759322 A JP S5759322A
Authority
JP
Japan
Prior art keywords
polycrystalline
layer
substrate
semiconductor device
roughening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55134548A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225251B2 (it
Inventor
Osamu Hataishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55134548A priority Critical patent/JPS5759322A/ja
Publication of JPS5759322A publication Critical patent/JPS5759322A/ja
Publication of JPS6225251B2 publication Critical patent/JPS6225251B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping

Landscapes

  • Bipolar Transistors (AREA)
JP55134548A 1980-09-27 1980-09-27 Manufacture of semiconductor device Granted JPS5759322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55134548A JPS5759322A (en) 1980-09-27 1980-09-27 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55134548A JPS5759322A (en) 1980-09-27 1980-09-27 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5759322A true JPS5759322A (en) 1982-04-09
JPS6225251B2 JPS6225251B2 (it) 1987-06-02

Family

ID=15130885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55134548A Granted JPS5759322A (en) 1980-09-27 1980-09-27 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5759322A (it)

Also Published As

Publication number Publication date
JPS6225251B2 (it) 1987-06-02

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