JPS5761902A - Measuring device of displacement - Google Patents

Measuring device of displacement

Info

Publication number
JPS5761902A
JPS5761902A JP13710780A JP13710780A JPS5761902A JP S5761902 A JPS5761902 A JP S5761902A JP 13710780 A JP13710780 A JP 13710780A JP 13710780 A JP13710780 A JP 13710780A JP S5761902 A JPS5761902 A JP S5761902A
Authority
JP
Japan
Prior art keywords
sensors
vibrations
constitution
error
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13710780A
Other languages
Japanese (ja)
Other versions
JPS611683B2 (en
Inventor
Masanobu Sato
Toshiji Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP13710780A priority Critical patent/JPS5761902A/en
Publication of JPS5761902A publication Critical patent/JPS5761902A/en
Publication of JPS611683B2 publication Critical patent/JPS611683B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To greatly reduce the effect due to vibrations of an object to be measured to the error of measurement, by calculating the output signal obtained through a simultaneous and backward scan of a solid-state image pickup element and then delivering the mean value in the form of a displacement signal. CONSTITUTION:Two image sensors 21 and 22 are provided, and the sensor 22 receives the beams branched through a half mirror 9. These two sensors are scanned simultaneously in the same speed and in the opposite directions to each other by a clock oscilltor 31 and a clock driver 32. In such constitution, the light given from a light source is irradiated to a moving object A to be measured, and the output signals received at a time by the sensors 21 and 22 are amplified by amplifiers 51 and 52. The mean value of both signals is calculated through an arithmetic circuit 8 to be turned into an output signal. In such way, the error of measurement caused by the vibrations of the object A can be greatly reduced compared with the conventional circuit.
JP13710780A 1980-09-30 1980-09-30 Measuring device of displacement Granted JPS5761902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13710780A JPS5761902A (en) 1980-09-30 1980-09-30 Measuring device of displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13710780A JPS5761902A (en) 1980-09-30 1980-09-30 Measuring device of displacement

Publications (2)

Publication Number Publication Date
JPS5761902A true JPS5761902A (en) 1982-04-14
JPS611683B2 JPS611683B2 (en) 1986-01-20

Family

ID=15191006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13710780A Granted JPS5761902A (en) 1980-09-30 1980-09-30 Measuring device of displacement

Country Status (1)

Country Link
JP (1) JPS5761902A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050408A (en) * 1983-08-30 1985-03-20 Ando Electric Co Ltd Coordinate measuring machine wherein measuring errors due to vibration are made less
JPS62213945A (en) * 1986-03-12 1987-09-19 Toshiba Mach Co Ltd Thermal displacement correcting device for machine tool

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050408A (en) * 1983-08-30 1985-03-20 Ando Electric Co Ltd Coordinate measuring machine wherein measuring errors due to vibration are made less
JPS62213945A (en) * 1986-03-12 1987-09-19 Toshiba Mach Co Ltd Thermal displacement correcting device for machine tool

Also Published As

Publication number Publication date
JPS611683B2 (en) 1986-01-20

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