JPS5761902A - Measuring device of displacement - Google Patents

Measuring device of displacement

Info

Publication number
JPS5761902A
JPS5761902A JP13710780A JP13710780A JPS5761902A JP S5761902 A JPS5761902 A JP S5761902A JP 13710780 A JP13710780 A JP 13710780A JP 13710780 A JP13710780 A JP 13710780A JP S5761902 A JPS5761902 A JP S5761902A
Authority
JP
Japan
Prior art keywords
sensors
vibrations
constitution
error
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13710780A
Other languages
English (en)
Other versions
JPS611683B2 (ja
Inventor
Masanobu Sato
Toshiji Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP13710780A priority Critical patent/JPS5761902A/ja
Publication of JPS5761902A publication Critical patent/JPS5761902A/ja
Publication of JPS611683B2 publication Critical patent/JPS611683B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13710780A 1980-09-30 1980-09-30 Measuring device of displacement Granted JPS5761902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13710780A JPS5761902A (en) 1980-09-30 1980-09-30 Measuring device of displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13710780A JPS5761902A (en) 1980-09-30 1980-09-30 Measuring device of displacement

Publications (2)

Publication Number Publication Date
JPS5761902A true JPS5761902A (en) 1982-04-14
JPS611683B2 JPS611683B2 (ja) 1986-01-20

Family

ID=15191006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13710780A Granted JPS5761902A (en) 1980-09-30 1980-09-30 Measuring device of displacement

Country Status (1)

Country Link
JP (1) JPS5761902A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050408A (ja) * 1983-08-30 1985-03-20 Ando Electric Co Ltd 振動による測定誤差を少なくした座標測定機
JPS62213945A (ja) * 1986-03-12 1987-09-19 Toshiba Mach Co Ltd 工作機械の熱変位補正装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050408A (ja) * 1983-08-30 1985-03-20 Ando Electric Co Ltd 振動による測定誤差を少なくした座標測定機
JPS62213945A (ja) * 1986-03-12 1987-09-19 Toshiba Mach Co Ltd 工作機械の熱変位補正装置

Also Published As

Publication number Publication date
JPS611683B2 (ja) 1986-01-20

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