JPS5762995A - Molecular pump - Google Patents

Molecular pump

Info

Publication number
JPS5762995A
JPS5762995A JP13587480A JP13587480A JPS5762995A JP S5762995 A JPS5762995 A JP S5762995A JP 13587480 A JP13587480 A JP 13587480A JP 13587480 A JP13587480 A JP 13587480A JP S5762995 A JPS5762995 A JP S5762995A
Authority
JP
Japan
Prior art keywords
stator
disk rotor
projection
suction pipe
circular groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13587480A
Other languages
Japanese (ja)
Inventor
Masahiro Mase
Atsushi Matsuzaki
Takuji Torii
Shinjiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13587480A priority Critical patent/JPS5762995A/en
Publication of JPS5762995A publication Critical patent/JPS5762995A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)

Abstract

PURPOSE: To simplify working and to obtain a high compression ratio by a method wherein by projections, guide provided on a rotor and a stator, gaseous molecules are made up to move sequentially over a plurality of circular grooves cut cosxially to the stator to increase pressure.
CONSTITUTION: A plurality of circular grooves 2 are made coxially on the surface of a disk rotor 1 and a suction pipe 11 and a discharge pipe 12 are provided on the stator 10. Seen from the turing direction of the arrow N of the disk rotor 1, in front of the suction pipe 11 as shown in the figure, a projection 13 which chockes part of the periphery of the circular groove 2 is provided on the stator 10 and a guide groove 34 is cut in front of the projection 13. When the disk rotor 1 is turned in an N direction, the gas absorbed from the suction pipe 11 collides with the disk rotor 1, obtains the momentum in the turning direction, advances in the circular groove 2 in the turing direction, is interrupted by the projection 13, is carried by a guide groove 14 sequentially to the next circular groove 2, is compressed highly and arrives at the discharge pipe 12. In this manner, a molecular pump of small size and high compression ratio can be obtained without difficult machining.
COPYRIGHT: (C)1982,JPO&Japio
JP13587480A 1980-10-01 1980-10-01 Molecular pump Pending JPS5762995A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13587480A JPS5762995A (en) 1980-10-01 1980-10-01 Molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13587480A JPS5762995A (en) 1980-10-01 1980-10-01 Molecular pump

Publications (1)

Publication Number Publication Date
JPS5762995A true JPS5762995A (en) 1982-04-16

Family

ID=15161788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13587480A Pending JPS5762995A (en) 1980-10-01 1980-10-01 Molecular pump

Country Status (1)

Country Link
JP (1) JPS5762995A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223297A (en) * 1988-07-13 1990-01-25 Osaka Shinku Kiki Seisakusho:Kk Circular groove vacuum pump
JPH0255897A (en) * 1988-08-17 1990-02-26 Osaka Shinku Kiki Seisakusho:Kk Combined vacuum pump
WO2001029417A1 (en) * 1999-10-18 2001-04-26 Sarcos Lc Compact molecular drag vacuum pump

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223297A (en) * 1988-07-13 1990-01-25 Osaka Shinku Kiki Seisakusho:Kk Circular groove vacuum pump
JPH0255897A (en) * 1988-08-17 1990-02-26 Osaka Shinku Kiki Seisakusho:Kk Combined vacuum pump
WO2001029417A1 (en) * 1999-10-18 2001-04-26 Sarcos Lc Compact molecular drag vacuum pump
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
US6866488B2 (en) 1999-10-18 2005-03-15 Sarcos Lc Compact molecular-drag vacuum pump
US7165931B2 (en) 1999-10-18 2007-01-23 Sarcos Investments Lc Compact molecular-drag vacuum pump

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