JPS5762995A - Molecular pump - Google Patents

Molecular pump

Info

Publication number
JPS5762995A
JPS5762995A JP13587480A JP13587480A JPS5762995A JP S5762995 A JPS5762995 A JP S5762995A JP 13587480 A JP13587480 A JP 13587480A JP 13587480 A JP13587480 A JP 13587480A JP S5762995 A JPS5762995 A JP S5762995A
Authority
JP
Japan
Prior art keywords
stator
disk rotor
projection
suction pipe
circular groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13587480A
Other languages
English (en)
Inventor
Masahiro Mase
Atsushi Matsuzaki
Takuji Torii
Shinjiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13587480A priority Critical patent/JPS5762995A/ja
Publication of JPS5762995A publication Critical patent/JPS5762995A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP13587480A 1980-10-01 1980-10-01 Molecular pump Pending JPS5762995A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13587480A JPS5762995A (en) 1980-10-01 1980-10-01 Molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13587480A JPS5762995A (en) 1980-10-01 1980-10-01 Molecular pump

Publications (1)

Publication Number Publication Date
JPS5762995A true JPS5762995A (en) 1982-04-16

Family

ID=15161788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13587480A Pending JPS5762995A (en) 1980-10-01 1980-10-01 Molecular pump

Country Status (1)

Country Link
JP (1) JPS5762995A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223297A (ja) * 1988-07-13 1990-01-25 Osaka Shinku Kiki Seisakusho:Kk 円周溝真空ポンプ
JPH0255897A (ja) * 1988-08-17 1990-02-26 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
WO2001029417A1 (en) * 1999-10-18 2001-04-26 Sarcos Lc Compact molecular drag vacuum pump

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223297A (ja) * 1988-07-13 1990-01-25 Osaka Shinku Kiki Seisakusho:Kk 円周溝真空ポンプ
JPH0255897A (ja) * 1988-08-17 1990-02-26 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
WO2001029417A1 (en) * 1999-10-18 2001-04-26 Sarcos Lc Compact molecular drag vacuum pump
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
US6866488B2 (en) 1999-10-18 2005-03-15 Sarcos Lc Compact molecular-drag vacuum pump
US7165931B2 (en) 1999-10-18 2007-01-23 Sarcos Investments Lc Compact molecular-drag vacuum pump

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