JPS5765327A - Plasma reaction treatment - Google Patents

Plasma reaction treatment

Info

Publication number
JPS5765327A
JPS5765327A JP14087080A JP14087080A JPS5765327A JP S5765327 A JPS5765327 A JP S5765327A JP 14087080 A JP14087080 A JP 14087080A JP 14087080 A JP14087080 A JP 14087080A JP S5765327 A JPS5765327 A JP S5765327A
Authority
JP
Japan
Prior art keywords
filter
plasma
reaction tube
treated
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14087080A
Other languages
Japanese (ja)
Other versions
JPS5849294B2 (en
Inventor
Toshihiro Hirotsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14087080A priority Critical patent/JPS5849294B2/en
Publication of JPS5765327A publication Critical patent/JPS5765327A/en
Publication of JPS5849294B2 publication Critical patent/JPS5849294B2/en
Expired legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE: To carry out desired surface treatment without accompanying modification of a material itself or damage of a surface thereof by inserting a filter between an object to be treated and plasma to alleviate plasma action.
CONSTITUTION: A filter 6 with a diameter slightly smaller than that of a reaction tube is inserted into said reaction tube and fixed by a ring 7 made of Teflon or the like. An object A to be treated is attached in a space between the reaction tube 1 and the filter 6. Thereby, plasma generated in the reaction tube 1 is acted on the object A to be treated through the filter and desired treatment is applied thereto. In this case, glow discharge is passed through the filter 6 but is not invaded into the space between the reaction tube 1 and the filter 6 and direct bombardment toward the object A to be treated due to plasma is avoided. By this method, even a material such as a film like or fibrous material can be subjected to plasma reaction treatment without obstruction.
COPYRIGHT: (C)1982,JPO&Japio
JP14087080A 1980-10-08 1980-10-08 Plasma reaction treatment method Expired JPS5849294B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14087080A JPS5849294B2 (en) 1980-10-08 1980-10-08 Plasma reaction treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14087080A JPS5849294B2 (en) 1980-10-08 1980-10-08 Plasma reaction treatment method

Publications (2)

Publication Number Publication Date
JPS5765327A true JPS5765327A (en) 1982-04-20
JPS5849294B2 JPS5849294B2 (en) 1983-11-02

Family

ID=15278661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14087080A Expired JPS5849294B2 (en) 1980-10-08 1980-10-08 Plasma reaction treatment method

Country Status (1)

Country Link
JP (1) JPS5849294B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932940A (en) * 1982-08-16 1984-02-22 Sankyo Dengiyou Kk Activating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932940A (en) * 1982-08-16 1984-02-22 Sankyo Dengiyou Kk Activating apparatus

Also Published As

Publication number Publication date
JPS5849294B2 (en) 1983-11-02

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