JPS5773639A - Temperature measurement system - Google Patents

Temperature measurement system

Info

Publication number
JPS5773639A
JPS5773639A JP15031980A JP15031980A JPS5773639A JP S5773639 A JPS5773639 A JP S5773639A JP 15031980 A JP15031980 A JP 15031980A JP 15031980 A JP15031980 A JP 15031980A JP S5773639 A JPS5773639 A JP S5773639A
Authority
JP
Japan
Prior art keywords
thermocouples
substrate
switches
thin
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15031980A
Other languages
Japanese (ja)
Inventor
Shigenobu Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15031980A priority Critical patent/JPS5773639A/en
Publication of JPS5773639A publication Critical patent/JPS5773639A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PURPOSE:To measure the temperature distribution of a substrate by forming thin- film thermocouples on the substrate and by detecting the temperature of the substrate by switching those thin-film thermocouples successively. CONSTITUTION:On an insulation-treated substrate 1, thin-film thermocouples 2a- 2n are formed, and compensating conductors 6a-6n, and 7a-7n are connected to the thermocouples 2a-2n respectively; and those compensating conductors 6a-7n are connected to changeover switches 8 and 9, the other terminals of which are connected to a potentiometer 10. Further, a controller 13 is equipped to control the changeover switches 8 and 9 and potentiometer 10. Then, the controller 13 switches the changeover contacts 8a-8n, and 9a-9n of the switches 8 and 9 to select the thermocouples 2a-2n successively, thereby detecting the temperature of the substate at more than one point.
JP15031980A 1980-10-27 1980-10-27 Temperature measurement system Pending JPS5773639A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15031980A JPS5773639A (en) 1980-10-27 1980-10-27 Temperature measurement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15031980A JPS5773639A (en) 1980-10-27 1980-10-27 Temperature measurement system

Publications (1)

Publication Number Publication Date
JPS5773639A true JPS5773639A (en) 1982-05-08

Family

ID=15494417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15031980A Pending JPS5773639A (en) 1980-10-27 1980-10-27 Temperature measurement system

Country Status (1)

Country Link
JP (1) JPS5773639A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995025265A1 (en) * 1994-03-17 1995-09-21 Materials Research Corporation Chamber temperature uniformity test fixture
US6494616B1 (en) * 2000-08-04 2002-12-17 Regents Of The University Of Minnesota Multiplexed sensor array
KR100680173B1 (en) 2004-09-03 2007-02-08 삼성전자주식회사 Capacitive Temperature Sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995025265A1 (en) * 1994-03-17 1995-09-21 Materials Research Corporation Chamber temperature uniformity test fixture
US6494616B1 (en) * 2000-08-04 2002-12-17 Regents Of The University Of Minnesota Multiplexed sensor array
KR100680173B1 (en) 2004-09-03 2007-02-08 삼성전자주식회사 Capacitive Temperature Sensor

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