JPS5773936A - Cassette holder for electron beam exposure - Google Patents

Cassette holder for electron beam exposure

Info

Publication number
JPS5773936A
JPS5773936A JP55150305A JP15030580A JPS5773936A JP S5773936 A JPS5773936 A JP S5773936A JP 55150305 A JP55150305 A JP 55150305A JP 15030580 A JP15030580 A JP 15030580A JP S5773936 A JPS5773936 A JP S5773936A
Authority
JP
Japan
Prior art keywords
cassette
holder
secured
pushing
furnished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55150305A
Other languages
English (en)
Inventor
Toru Tojo
Kazuyoshi Sugihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55150305A priority Critical patent/JPS5773936A/ja
Publication of JPS5773936A publication Critical patent/JPS5773936A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP55150305A 1980-10-27 1980-10-27 Cassette holder for electron beam exposure Pending JPS5773936A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55150305A JPS5773936A (en) 1980-10-27 1980-10-27 Cassette holder for electron beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55150305A JPS5773936A (en) 1980-10-27 1980-10-27 Cassette holder for electron beam exposure

Publications (1)

Publication Number Publication Date
JPS5773936A true JPS5773936A (en) 1982-05-08

Family

ID=15494093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55150305A Pending JPS5773936A (en) 1980-10-27 1980-10-27 Cassette holder for electron beam exposure

Country Status (1)

Country Link
JP (1) JPS5773936A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054325U (ja) * 1983-09-21 1985-04-16 東芝機械株式会社 電子ビ−ム描画装置の試料カセット
US4711438A (en) * 1986-05-08 1987-12-08 Micrion Limited Partnership Mask holding
US8436467B2 (en) 2007-06-15 2013-05-07 Rohm Co., Ltd. Semiconductor device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054325U (ja) * 1983-09-21 1985-04-16 東芝機械株式会社 電子ビ−ム描画装置の試料カセット
US4711438A (en) * 1986-05-08 1987-12-08 Micrion Limited Partnership Mask holding
US8436467B2 (en) 2007-06-15 2013-05-07 Rohm Co., Ltd. Semiconductor device
US8922010B2 (en) 2007-06-15 2014-12-30 Rohm Co., Ltd. Semiconductor device
US9053991B2 (en) 2007-06-15 2015-06-09 Rohm Co., Ltd. Semiconductor device
US9123628B2 (en) 2007-06-15 2015-09-01 Rohm Co., Ltd. Semiconductor device
US9466583B2 (en) 2007-06-15 2016-10-11 Rohm Co., Ltd. Semiconductor device
US9685419B2 (en) 2007-06-15 2017-06-20 Rohm Co., Ltd. Semiconductor device
US10032739B2 (en) 2007-06-15 2018-07-24 Rohm Co., Ltd. Semiconductor device
US10510700B2 (en) 2007-06-15 2019-12-17 Rohm Co., Ltd. Semiconductor device
US11037897B2 (en) 2007-06-15 2021-06-15 Rohm Co., Ltd. Semiconductor device

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