JPS5774944A - Field radiation type ion generator - Google Patents

Field radiation type ion generator

Info

Publication number
JPS5774944A
JPS5774944A JP55149897A JP14989780A JPS5774944A JP S5774944 A JPS5774944 A JP S5774944A JP 55149897 A JP55149897 A JP 55149897A JP 14989780 A JP14989780 A JP 14989780A JP S5774944 A JPS5774944 A JP S5774944A
Authority
JP
Japan
Prior art keywords
electrode
draw
ionization material
ion generator
type ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55149897A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55149897A priority Critical patent/JPS5774944A/en
Publication of JPS5774944A publication Critical patent/JPS5774944A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To generate the ion flow subsistance having high melting point under relatively low temperature by employing such alloy as composed of more than two components as the ionization material. CONSTITUTION:An alloy 9 composed of more than two components is filled as the ionization material in an ionization material sump 7 in an ion generating source equipped with a needle electrode 6 of tungsten, an ionization material sump 7 and a heating resistor 8. Then a draw-out electrode 10 and a mass separating electrode 11 are arranged at the post stage and after evacuating the device fixed with the ion generating source, the draw-out electrode 10 and the mass separating electrode 11, predetermined voltages are applied on the draw-out electrode 10 and the mass separating electrode 11.
JP55149897A 1980-10-25 1980-10-25 Field radiation type ion generator Pending JPS5774944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55149897A JPS5774944A (en) 1980-10-25 1980-10-25 Field radiation type ion generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55149897A JPS5774944A (en) 1980-10-25 1980-10-25 Field radiation type ion generator

Publications (1)

Publication Number Publication Date
JPS5774944A true JPS5774944A (en) 1982-05-11

Family

ID=15484997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55149897A Pending JPS5774944A (en) 1980-10-25 1980-10-25 Field radiation type ion generator

Country Status (1)

Country Link
JP (1) JPS5774944A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101749A (en) * 1982-12-01 1984-06-12 Hitachi Ltd Multi-ion source
JPS62216130A (en) * 1987-03-13 1987-09-22 Hitachi Ltd Liquid metal ion source
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730243A (en) * 1980-07-31 1982-02-18 Rikagaku Kenkyusho Ion beam forming method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730243A (en) * 1980-07-31 1982-02-18 Rikagaku Kenkyusho Ion beam forming method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101749A (en) * 1982-12-01 1984-06-12 Hitachi Ltd Multi-ion source
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders
JPS62216130A (en) * 1987-03-13 1987-09-22 Hitachi Ltd Liquid metal ion source

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