JPS5774944A - Field radiation type ion generator - Google Patents

Field radiation type ion generator

Info

Publication number: JPS5774944A
Authority: JP; Japan
Prior art keywords: electrode; draw; ionization material; ion generator; type ion
Prior art date: 1980-10-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP55149897A

Other languages

English (en)

Inventor

Katsuhiro Kawabuchi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toshiba Corp

Original Assignee

Toshiba Corp

Tokyo Shibaura Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1980-10-25

Filing date

1980-10-25

Publication date

1982-05-11

1980-10-25 Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp

1980-10-25 Priority to JP55149897A priority Critical patent/JPS5774944A/ja

1982-05-11 Publication of JPS5774944A publication Critical patent/JPS5774944A/ja

Status Pending legal-status Critical Current

Links

230000005855 radiation Effects 0.000 title 1
239000000463 material Substances 0.000 abstract 4
239000000956 alloy Substances 0.000 abstract 2
229910045601 alloy Inorganic materials 0.000 abstract 2
238000010438 heat treatment Methods 0.000 abstract 1
230000008018 melting Effects 0.000 abstract 1
238000002844 melting Methods 0.000 abstract 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
229910052721 tungsten Inorganic materials 0.000 abstract 1
239000010937 tungsten Substances 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Combustion & Propulsion (AREA)
Electron Sources, Ion Sources (AREA)
Electron Tubes For Measurement (AREA)

JP55149897A 1980-10-25 1980-10-25 Field radiation type ion generator Pending JPS5774944A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP55149897A JPS5774944A (en)	1980-10-25	1980-10-25	Field radiation type ion generator

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP55149897A JPS5774944A (en)	1980-10-25	1980-10-25	Field radiation type ion generator

Publications (1)

Publication Number	Publication Date
JPS5774944A true JPS5774944A (en)	1982-05-11

Family

ID=15484997

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP55149897A Pending JPS5774944A (en)	1980-10-25	1980-10-25	Field radiation type ion generator

Country Status (1)

Country	Link
JP (1)	JPS5774944A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59101749A (ja) *	1982-12-01	1984-06-12	Hitachi Ltd	イオン源およびイオンビーム形成方法
JPS62216130A (ja) *	1987-03-13	1987-09-22	Hitachi Ltd	液体金属イオン源
US4762975A (en) *	1984-02-06	1988-08-09	Phrasor Scientific, Incorporated	Method and apparatus for making submicrom powders

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5730243A (en) *	1980-07-31	1982-02-18	Rikagaku Kenkyusho	Ion beam forming method

1980
- 1980-10-25 JP JP55149897A patent/JPS5774944A/ja active Pending

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5730243A (en) *	1980-07-31	1982-02-18	Rikagaku Kenkyusho	Ion beam forming method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59101749A (ja) *	1982-12-01	1984-06-12	Hitachi Ltd	イオン源およびイオンビーム形成方法
US4762975A (en) *	1984-02-06	1988-08-09	Phrasor Scientific, Incorporated	Method and apparatus for making submicrom powders
JPS62216130A (ja) *	1987-03-13	1987-09-22	Hitachi Ltd	液体金属イオン源

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