JPS5775776A - Temperature detector and controller of polishing machine - Google Patents

Temperature detector and controller of polishing machine

Info

Publication number
JPS5775776A
JPS5775776A JP55150110A JP15011080A JPS5775776A JP S5775776 A JPS5775776 A JP S5775776A JP 55150110 A JP55150110 A JP 55150110A JP 15011080 A JP15011080 A JP 15011080A JP S5775776 A JPS5775776 A JP S5775776A
Authority
JP
Japan
Prior art keywords
cavity
temperature detector
surface plate
temperature
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55150110A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317621B2 (2
Inventor
Hatsuyuki Arai
Seiichi Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Speedfam Corp
Original Assignee
SUPIIDE FUAMU KK
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK, Speedfam Corp filed Critical SUPIIDE FUAMU KK
Priority to JP55150110A priority Critical patent/JPS5775776A/ja
Publication of JPS5775776A publication Critical patent/JPS5775776A/ja
Publication of JPH0317621B2 publication Critical patent/JPH0317621B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP55150110A 1980-10-28 1980-10-28 Temperature detector and controller of polishing machine Granted JPS5775776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55150110A JPS5775776A (en) 1980-10-28 1980-10-28 Temperature detector and controller of polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55150110A JPS5775776A (en) 1980-10-28 1980-10-28 Temperature detector and controller of polishing machine

Publications (2)

Publication Number Publication Date
JPS5775776A true JPS5775776A (en) 1982-05-12
JPH0317621B2 JPH0317621B2 (2) 1991-03-08

Family

ID=15489700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55150110A Granted JPS5775776A (en) 1980-10-28 1980-10-28 Temperature detector and controller of polishing machine

Country Status (1)

Country Link
JP (1) JPS5775776A (2)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840265A (ja) * 1981-08-28 1983-03-09 Toshiba Corp 両面ポリシング装置
JPS6056460U (ja) * 1983-09-27 1985-04-19 株式会社東芝 研磨装置
JPS61265262A (ja) * 1985-05-17 1986-11-25 Hitachi Ltd 研磨装置
JPH0435865A (ja) * 1990-05-30 1992-02-06 Noritake Co Ltd 砥石車
JP2003071714A (ja) * 2001-09-05 2003-03-12 Disco Abrasive Syst Ltd 研磨装置
IT201900000777A1 (it) * 2019-01-18 2020-07-18 S I A P I Soc Importazione Approvvigionamenti Prodotti Industriali S R L Mola per la lavorazione superficiale di pezzi e apparecchiatura utensile utilizzante detta mola

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131181A (2) * 1973-04-20 1974-12-16
JPS5454390A (en) * 1977-10-08 1979-04-28 Shibayama Kikai Kk Cooling water temperature control system for polishing table

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131181A (2) * 1973-04-20 1974-12-16
JPS5454390A (en) * 1977-10-08 1979-04-28 Shibayama Kikai Kk Cooling water temperature control system for polishing table

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840265A (ja) * 1981-08-28 1983-03-09 Toshiba Corp 両面ポリシング装置
JPS6056460U (ja) * 1983-09-27 1985-04-19 株式会社東芝 研磨装置
JPS61265262A (ja) * 1985-05-17 1986-11-25 Hitachi Ltd 研磨装置
JPH0435865A (ja) * 1990-05-30 1992-02-06 Noritake Co Ltd 砥石車
JP2003071714A (ja) * 2001-09-05 2003-03-12 Disco Abrasive Syst Ltd 研磨装置
IT201900000777A1 (it) * 2019-01-18 2020-07-18 S I A P I Soc Importazione Approvvigionamenti Prodotti Industriali S R L Mola per la lavorazione superficiale di pezzi e apparecchiatura utensile utilizzante detta mola

Also Published As

Publication number Publication date
JPH0317621B2 (2) 1991-03-08

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