JPS5776431A - Semiconductor ressure transducer - Google Patents

Semiconductor ressure transducer

Info

Publication number
JPS5776431A
JPS5776431A JP55151372A JP15137280A JPS5776431A JP S5776431 A JPS5776431 A JP S5776431A JP 55151372 A JP55151372 A JP 55151372A JP 15137280 A JP15137280 A JP 15137280A JP S5776431 A JPS5776431 A JP S5776431A
Authority
JP
Japan
Prior art keywords
boards
vessels
sensitive element
pressure sensitive
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55151372A
Other languages
English (en)
Inventor
Susumu Kimijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55151372A priority Critical patent/JPS5776431A/ja
Publication of JPS5776431A publication Critical patent/JPS5776431A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0038Fluidic connecting means being part of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP55151372A 1980-10-30 1980-10-30 Semiconductor ressure transducer Pending JPS5776431A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55151372A JPS5776431A (en) 1980-10-30 1980-10-30 Semiconductor ressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55151372A JPS5776431A (en) 1980-10-30 1980-10-30 Semiconductor ressure transducer

Publications (1)

Publication Number Publication Date
JPS5776431A true JPS5776431A (en) 1982-05-13

Family

ID=15517111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55151372A Pending JPS5776431A (en) 1980-10-30 1980-10-30 Semiconductor ressure transducer

Country Status (1)

Country Link
JP (1) JPS5776431A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112133U (ja) * 1983-01-17 1984-07-28 株式会社島津製作所 圧力センサ
JPS6121944U (ja) * 1984-07-12 1986-02-08 横河電機株式会社 保温型受圧カプセル
JPH01311229A (ja) * 1988-03-08 1989-12-15 Ppg Hellige Bv 双方向ガス流のための差圧測定器
WO2019063715A1 (de) * 2017-09-28 2019-04-04 Tdk Electronics Ag Mediengetrennter drucktransmitter
CN111108359A (zh) * 2017-09-28 2020-05-05 Tdk电子股份有限公司 在陶瓷基底上的压力传感器
JP2020535411A (ja) * 2017-09-28 2020-12-03 ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフトTdk Electronics Ag セラミック圧力接続部上の圧力センサ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112133U (ja) * 1983-01-17 1984-07-28 株式会社島津製作所 圧力センサ
JPS6121944U (ja) * 1984-07-12 1986-02-08 横河電機株式会社 保温型受圧カプセル
JPH01311229A (ja) * 1988-03-08 1989-12-15 Ppg Hellige Bv 双方向ガス流のための差圧測定器
WO2019063715A1 (de) * 2017-09-28 2019-04-04 Tdk Electronics Ag Mediengetrennter drucktransmitter
CN111108359A (zh) * 2017-09-28 2020-05-05 Tdk电子股份有限公司 在陶瓷基底上的压力传感器
JP2020535437A (ja) * 2017-09-28 2020-12-03 ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフトTdk Electronics Ag 媒体分離型圧力トランスミッタ
JP2020535411A (ja) * 2017-09-28 2020-12-03 ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフトTdk Electronics Ag セラミック圧力接続部上の圧力センサ
JP2020535434A (ja) * 2017-09-28 2020-12-03 ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフトTdk Electronics Ag セラミック基板上の圧力センサ
US11085844B2 (en) 2017-09-28 2021-08-10 Tdk Electronics Ag Media-separated pressure transmitter

Similar Documents

Publication Publication Date Title
JPS55103439A (en) Semiconductor pressure sensor
AU2108100A (en) Platinum temperature sensor and its method of production
JPS6471115A (en) Method of joining semiconductor substrate
JPS5753947A (en) Transistor and electronic device containing it
JPS5776431A (en) Semiconductor ressure transducer
US3836796A (en) Semiconductor pressure transducer employing novel temperature compensation means
US3886799A (en) Semiconductor pressure transducer employing temperature compensation circuits and novel heater circuitry
EP0186976A3 (en) Forming glass layers on semiconductor substrates
JPS5387238A (en) Diode matrix heat sensitive heads combined in one body
JPS5451490A (en) Semiconductor pressure converter
JPS56148870A (en) Semiconductor presssure converter
JPS568863A (en) Substrate for semiconductor device
JPS5717158A (en) Manufacture of semiconductor device
JPS57171235A (en) Semiconductor pressure converter
JPS56146256A (en) Hybrid ic device
JPS5565448A (en) Ceramic package for semiconductor device
JPS57141949A (en) Manufacture of thin film hybrid integrated circuit
JPS54127690A (en) Semiconductor pressure converter and its manufacture
JPS6448437A (en) Electrode structure
JPS5749258A (en) Semiconductor device
JPS5649549A (en) Semiconductor device
JPS6422035A (en) Semiconductor device
JPS55138240A (en) Manufacture of semiconductor device
JPS5533024A (en) Semiconductor device for converting pressure
JPS6444027A (en) Semiconductor device