JPS5776831A - Liquid phase growing method - Google Patents

Liquid phase growing method

Info

Publication number
JPS5776831A
JPS5776831A JP15313780A JP15313780A JPS5776831A JP S5776831 A JPS5776831 A JP S5776831A JP 15313780 A JP15313780 A JP 15313780A JP 15313780 A JP15313780 A JP 15313780A JP S5776831 A JPS5776831 A JP S5776831A
Authority
JP
Japan
Prior art keywords
solution
growth
bottles
growing
blended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15313780A
Other languages
Japanese (ja)
Inventor
Yorimitsu Nishitani
Saburo Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15313780A priority Critical patent/JPS5776831A/en
Publication of JPS5776831A publication Critical patent/JPS5776831A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Semiconductor Lasers (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To reduce the cost and to equalize the quality of solution based on a burning effect, by using the second solution having a replenishing composition in addition to the first growing solution, and reusing the growing solution whith has been used before. CONSTITUTION:Solution bottles in a plurality of lines on a growing boat are provided so that they can be divided by a separating pieces 4 of partitioning plate 3. In the botles 1-1'' in one line, the specified first solutionIfor growing is put. In the bottles 2-2'' in the other line, the second solution II with the replinishing composition which becomes the same composition as the solutionIwhen the solutionsI and II are blended after the growth of a crystal film by the solutionIis put. After the growth of the crystal film by the solutionI, the separating pieces 4 are operated, and the solutionsIand II are blended. When the second growth is performed, said blended liquid is heated to the growth starting temperature, the blended liquid is separated into the bottles 1-1'' and 2-2''. The second growth of the crystal film is performed by using the bottles 1-1''. The same procedure is repeated hereinager.
JP15313780A 1980-10-31 1980-10-31 Liquid phase growing method Pending JPS5776831A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15313780A JPS5776831A (en) 1980-10-31 1980-10-31 Liquid phase growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15313780A JPS5776831A (en) 1980-10-31 1980-10-31 Liquid phase growing method

Publications (1)

Publication Number Publication Date
JPS5776831A true JPS5776831A (en) 1982-05-14

Family

ID=15555807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15313780A Pending JPS5776831A (en) 1980-10-31 1980-10-31 Liquid phase growing method

Country Status (1)

Country Link
JP (1) JPS5776831A (en)

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