JPS5797621A - Boat for liquid phase epitaxial growth - Google Patents

Boat for liquid phase epitaxial growth

Info

Publication number
JPS5797621A
JPS5797621A JP17602480A JP17602480A JPS5797621A JP S5797621 A JPS5797621 A JP S5797621A JP 17602480 A JP17602480 A JP 17602480A JP 17602480 A JP17602480 A JP 17602480A JP S5797621 A JPS5797621 A JP S5797621A
Authority
JP
Japan
Prior art keywords
chamber
slider
melt liquid
plate
dividable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17602480A
Other languages
Japanese (ja)
Inventor
Takao Oda
Susumu Yoshida
Kotaro Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17602480A priority Critical patent/JPS5797621A/en
Publication of JPS5797621A publication Critical patent/JPS5797621A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/066—Injection or centrifugal force system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To make a saturated Ga melt liquid to be distributed on substrates uniformly by a method wherein dividable plates to be divided on both sides respectively by sliding plates are provided between an upper chamber and a lower chamber. CONSTITUTION:The plate 12 dividable on both sides and the slider 6 are provided in the boat main body 1. The saturated Ga melt liquid 8 is filled up in the upper chamber 2, and the substrates 9 are provided in a holding device 10. The device 10 is provided in a middle chamber 3 separated by the plate 13 dividable on both sides and the slider 7. Then the plate 12 is separated by sliding the slider 6 leftward, and the melt liquid 8 drops in the chamber 3. Epitaxial growth is performed in this condition. When the slider 6 is transferred leftward moreover, the slider 7 slides, the plate 13 is divided, and the melt liquid 8 in the chamber 3 is accommodated in a drawer 5 in the chamber 4. Accordingly because the melt liquid 8 becomes as to be poured from the center of the substrates 9, uniform distribution can be attained.
JP17602480A 1980-12-10 1980-12-10 Boat for liquid phase epitaxial growth Pending JPS5797621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17602480A JPS5797621A (en) 1980-12-10 1980-12-10 Boat for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17602480A JPS5797621A (en) 1980-12-10 1980-12-10 Boat for liquid phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS5797621A true JPS5797621A (en) 1982-06-17

Family

ID=16006384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17602480A Pending JPS5797621A (en) 1980-12-10 1980-12-10 Boat for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5797621A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61270818A (en) * 1985-05-25 1986-12-01 Mitsubishi Electric Corp Liquid phase epitaxial growth equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5380965A (en) * 1976-12-27 1978-07-17 Toshiba Corp Liquid-phase growth method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5380965A (en) * 1976-12-27 1978-07-17 Toshiba Corp Liquid-phase growth method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61270818A (en) * 1985-05-25 1986-12-01 Mitsubishi Electric Corp Liquid phase epitaxial growth equipment

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